scholarly journals Micro-electro-mechanical systems (MEMS): Technology for the 21st century

2014 ◽  
Vol 68 (5) ◽  
pp. 629-641 ◽  
Author(s):  
Tatjana Djakov ◽  
Ivanka Popovic ◽  
Ljubinka Rajakovic
Keyword(s):  
21St Century ◽  
Low Cost ◽  
Mechanical Systems ◽  
Modern Society ◽  
Global Scale ◽  
Thermal Constant ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Industrial Sectors ◽  
Mems Technology

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

Scope of RF MEMS Technology for Microwave Circuits and Systems

2021 ◽  
pp. 1-22
Author(s):  
Kanthamani Sundharajan
Keyword(s):  
Rf Mems ◽  
Low Cost ◽  
Microwave Circuits ◽  
Micro Electro Mechanical Systems ◽  
Mems Switches ◽  
Phased Array Antennas ◽  
Array Antennas ◽  
Rf Mems Switches ◽  
Mems Technology ◽  
Key Issues

Micro-electro mechanical systems (MEMS) technology has facilitated the need for innovative approaches in the design and development of miniaturized, effective, low-cost radio frequency (RF) microwave circuits and systems. This technology is expected to have significant role in today's 5G applications for the development of reconfigurable architectures. This chapter presents an overview of the evolution of MEMS-based subsystems and devices, especially switches and phased array antennas. This chapter also discusses the key issues in design and analysis of RF MEMS-based devices, particularly with primary emphasis on RF MEMS switches and antennas.

RF-MEMS Based Oscillators

2012 ◽  
pp. 120-155
Author(s):  
Anis Nurashikin Nordin
Keyword(s):  
Acoustic Wave ◽  
Rf Mems ◽  
Low Cost ◽  
Individual Characteristics ◽  
Bulk Acoustic Wave ◽  
Mems Devices ◽  
Device Structure ◽  
Micro Electro Mechanical Systems ◽  
Wireless Transceiver ◽  
Film Bulk

Today’s high-tech consumer market demand complex, portable personal wireless consumer devices that are low-cost and have small sizes. Creative methods of combining mature integrated circuit (IC) fabrication techniques with innovative radio-frequency micro-electro-mechanical systems (RF-MEMS) devices has given birth to wireless transceiver components, which operate at higher frequencies but are manufactured at the low-cost of standard ICs. Oscillators, RF bandpass filters, and low noise amplifiers are the most critical and important modules of any wireless transceiver. Their individual characteristics determine the overall performance of a transceiver. This chapter illustrates RF-oscillators that utilize MEMS devices such as resonators, varactors, and inductors for frequency generation. Emphasis will be given on state of the art RF-MEMS components such as film bulk acoustic wave, surface acoustic wave, flexural mode resonators, lateral and vertical varactors, and solenoid and planar inductors. The advantages and disadvantages of each device structure are described, with reference to the most recent work published in the field.

Identification of Vibration Parameters of Mechanical System Utilizing Low-Cost MEMS Accelerometers

2019 ◽  
Vol 894 ◽  
pp. 1-8
Author(s):  
Khanh Duong Quang ◽  
Huong Vuong Thi ◽  
Anh Luu Van
Keyword(s):  
High Speed ◽  
Low Cost ◽  
Damping Ratio ◽  
Vibration Reduction ◽  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Mems Accelerometer ◽  
System Parameters ◽  
Mems Accelerometers ◽  
Vibration Parameters

Multi-axial mechanical systems commonly encounter the problem of vibration while attempting to drive machining systems at high speed. Many effective methods based on feed-forward and feedback control have been proposed and applied for vibration reduction. In order to design controllers all methods require the exact knowledge of system parameters: vibration frequency and damping ratio. In recent years, low-cost Micro Electro Mechanical Systems (MEMS) accelerometers have been used for many applications in industry. This paper presents the advantage of low cost MEMS accelerometer to identify vibration parameters of mechanical systems in comparison to conventional expensive devices.

Simulation of Gold Nanoparticles Aggravating MEMS Cantilever Optical Static Detection Biochip

2013 ◽  
Vol 694-697 ◽  
pp. 966-970 ◽  
Author(s):  
Yue Tao Ge ◽  
Xiao Tong Yin
Keyword(s):  
Gold Nanoparticles ◽  
Low Cost ◽  
Mechanical Systems ◽  
Side Wall ◽  
High Sensitivity ◽  
Detection Sensitivity ◽  
Gene Detection ◽  
Micro Electro Mechanical Systems ◽  
Target Dna ◽  
Static Detection

A kind of gene detection biochip model based on biological micro electro mechanical systems (BioMEMS) technology and micro optical electro mechanical systems (MOEMS) technology is designed and simulated. In order to detect whether there are nucleic acid components in the testing samples, the biochip in this study issues horizontal light by laser, then receives and reads the deformation signals of MEMS cantilever by optical detector. The MEMS optical reflecting system can amplify MEMS cantilever deformation signal 22 times by micro reflectors which are set on the side wall of the cantilever free end. In order to improve optical detection sensitivity, gold nanoparticles (GNPs) which are combined with hybridization information is taken to aggravate MEMS cantilever, and employ Au - S chemical bond of GNPs and dithiol HS(CH2)6SH to combine and fix DNA probe, and then employ target DNA which is marked with biotin to combine GNPs by Biotin - Streptavidin combining. The simulation results show that this biochip can detect biological samples fast, high throughput, low cost, high sensitivity and reliably.

A Batch Fabricated Linear Synchronous Motor

2003 ◽  
Author(s):  
Martin Fo¨hse ◽  
Hans-D. Sto¨lting ◽  
Jens Edler ◽  
Hans H. Gatzen
Keyword(s):  
Mechanical Systems ◽  
Synchronous Motor ◽  
Micro Electro Mechanical Systems ◽  
Basic Approach ◽  
Linear Synchronous Motor ◽  
Mems Technology ◽  
Linear Actuators

Micro electro-mechanical systems (MEMS) technology opens up new ways of miniaturizing electromagnetic motors. A very promising approach for building miniature linear actuators is to fabricate the stator as well as the traveler separately and merging the motor components in a microassembly process [1]. This paper describes design, fabrication, and evaluation results of a linear synchronous actuator following this basic approach.

Micro-Electro-Mechanical Systems (MEMS) Micro-Heater

2012 ◽  
Author(s):  
C. N. Janakos ◽  
F. T. Goericke ◽  
A. P. Pisano
Keyword(s):  
Mechanical Systems ◽  
Testing Device ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Mems Packaging ◽  
Rate Table ◽  
Heating Device ◽  
Localized Heating

This research addresses the problem of not having access to a localized heating device that easily integrates a variety of testing needs with MEMS packaging. This device can heat MEMS while simultaneously in vacuum, exposed to harsh gases and on a rate table. The solution is a micro-heater built directly into its packaging with the capability to test MEMS at vacuum, which can be pumped down to 1 Torr in a fraction of a second and heats the device to approximately 170 degrees Celsius to simulate the temperatures MEMS devices endure. This packaging integrated with a testing device can accommodate a broad range of MEMS devices.

scholarly journals Toward Operations in a Surgical Scenario: Characterization of a Microgripper via Light Microscopy Approach

2019 ◽  
Vol 9 (9) ◽  
pp. 1901 ◽  
Author(s):  
Federica Vurchio ◽  
Pietro Ursi ◽  
Francesco Orsini ◽  
Andrea Scorza ◽  
Rocco Crescenzi ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Statistical Analysis ◽  
Scanning Electron Microscope ◽  
Light Microscopy ◽  
Mechanical Systems ◽  
Optical Microscope ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
Scanning Electron

Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. However, a surgical scenario is much more aggressive and requires several higher abilities in the microsystem, such as the capability of operating within a liquid or wet environment, accuracy, reliability and sophisticated packaging. Unfortunately, testing and characterizing MEMS experimentally without fundamental support of a SEM is rather challenging. This paper shows that in spite of large difficulties due to well-known physical limits, the optical microscope is still able to play an important role in MEMS characterization at room conditions. This outcome is supported by the statistical analysis of two series of measurements, obtained by a light trinocular microscope and a profilometer, respectively.

DYNAMICS OF ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEMS: SINGLE DEVICE AND ARRAYS OF DEVICES

2009 ◽  
Vol 19 (03) ◽  
pp. 1007-1022 ◽  
Author(s):  
V. Y. TAFFOTI YOLONG ◽  
P. WOAFO
Keyword(s):  
Chaotic Behavior ◽  
Equilibrium Points ◽  
Dynamical Behavior ◽  
Mechanical Systems ◽  
Largest Lyapunov Exponent ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Electrostatically Actuated ◽  
In Series ◽  
Electrostatic Coupling

The dynamical behavior of micro-electro-mechanical systems (MEMS) with electrostatic coupling is studied. A nonlinear modal analysis approach is applied to decompose the partial differential equation into a set of ordinary differential equations. The stability analysis of the equilibrium points is investigated. The amplitudes of the harmonic oscillatory states in the triple resonant states are obtained and discussed. Chaotic behavior is investigated using bifurcations diagram and the largest Lyapunov exponent. The dynamics of the MEMS with multiple functions in series is also investigated as well as the transitions boundaries for the complete synchronization state in a shift-invariant set of coupled MEMS devices.

Errors in micro-electro-mechanical systems inertial measurement and a review on present practices of error modelling

2017 ◽  
Vol 40 (9) ◽  
pp. 2843-2854 ◽  
Author(s):  
Renu Bhardwaj ◽  
Neelesh Kumar ◽  
Vipan Kumar
Keyword(s):  
Inertial Sensors ◽  
Inertial Sensor ◽  
Mechanical Systems ◽  
Stochastic Modelling ◽  
Future Research ◽  
Mems Devices ◽  
Specific System ◽  
Micro Electro Mechanical Systems ◽  
Inertial Measurement ◽  
Calibration Methods

Micro-electro-mechanical systems (MEMS) technology-based accelerometers and gyroscopes are small size, mass produced, low cost inertial sensors, which are now being used in aerospace, underwater vehicles, automotive, robotics, mobiles, gaming consoles, prosthetic devices and many other applications. MEMS inertial sensors are available in many grades in market and selecting the appropriate grade sensor is very important. Owing to interaction of different types of energies, different noises are generated in MEMS devices; these noises cause significant change in output and the first section of this paper illustrates that. In application, where MEMS inertial sensors are used, the accuracy, repeatability and reproducibility of inertia measurement is probed primarily by complex testing, using extensive range of physical stimuli. Noises in inertial measurement are generally dealt by designing a unit measurement model. Noises are treated as additive error in linear unit model and are modelled using various techniques so that errors can be compensated to improve the accuracy. This paper reviews the theory, framework and methodology used in the error model of a MEMS inertial sensor and stochastic modelling of measurement. Experimental results from the most commonly used Allan variance techniques are discussed. Error modelling methodology, consisting of testing and calibration methods, designing thermal model, stochastic modelling and parameter estimation techniques, is illustrated. Figures and tables under each section summarize features, merits, limitation and future research scope. This paper should serve as a single reference for researchers and engineers working on application specific system design and instrumentation using MEMS inertial sensors. Conclusion from the study should help in selecting the appropriate grade of sensor as well as the best error modelling as per the trade-off existing between accuracy and development cost of error modelling.

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