Novel full range vacuum pressure sensing technique using free decay of trapezoid micro-cantilever beam deflected by electrostatic force

2012 ◽  
Vol 18 (11) ◽  
pp. 1903-1908 ◽  
Author(s):  
Yu-Ting Wang ◽  
Tien-Chen Hu ◽  
Chi-Jia Tong ◽  
Ming-Tzer Lin
Keyword(s):  
Cantilever Beam ◽  
Electrostatic Force ◽  
Full Range ◽  
Vacuum Pressure ◽  
Pressure Sensing ◽  
Free Decay ◽  
Micro Cantilever

Characteristics of Stress Distribution of Micro-Cantilever of Polycrystalline Copper at the Pull-in Voltage

2013 ◽  
Vol 300-301 ◽  
pp. 1309-1312
Author(s):  
Ji Long Su ◽  
Yan Jiao Zhang ◽  
Xing Feng Lian
Keyword(s):  
Stress Distribution ◽  
Cantilever Beam ◽  
Electrostatic Force ◽  
Polycrystalline Copper ◽  
Maximum Deflection ◽  
Micro Cantilever ◽  
Fixed End ◽  
The Relationship

The Ansys simulate software is utilized to analyze pull-in voltages and stresses of the fixed end of micro- cantilever beam with different thicknesses respectively. Based on the analysis of the electrostatic force at the pull-in voltage, the stress of fixed end of micro-beam and the maximum deflection are obtained. The relationship between the stress of fixed end and thickness is established. The results show that the mutation thickness of the stress and the pull-in voltage are at and respectively , it is consistent with the intrinsic size of the polycrystalline copper micro-beam.

scholarly journals Optimal Design of Capacitive Micro Cantilever Beam Accelerometer

2009 ◽  
Vol 3 (9) ◽  
Author(s):  
Othman Sidek ◽  
Muhamad Azman Miskam ◽  
H.M.T Khaleed ◽  
Mohd Fauzi Alias ◽  
Shukri Korakkottil Kunhi Mohd
Keyword(s):  
Optimal Design ◽  
Cantilever Beam ◽  
Micro Cantilever

Design and Fabrication of Micro-Cantilever Beam Fiber Bragg Grating Hydrogen Sensor Based on Coated-Palladium Film

2010 ◽  
Vol 37 (7) ◽  
pp. 1784-1788 ◽  
Author(s):  
张晓晶 Zhang Xiaojing ◽  
张博明 Zhang Boming ◽  
陈吉安 Chen Ji′an ◽  
武湛君 Wu Zhanjun
Keyword(s):  
Fiber Bragg Grating ◽  
Cantilever Beam ◽  
Hydrogen Sensor ◽  
Bragg Grating ◽  
Micro Cantilever

Intelligent vibration control of micro-cantilever beam in MEMS

2011 ◽  
Author(s):  
Atabak Sarrafan ◽  
Seiyed Hamid Zareh ◽  
Abolghassem Zabihollah ◽  
Amir Ali Khayyat
Keyword(s):  
Vibration Control ◽  
Cantilever Beam ◽  
Micro Cantilever

Investigation for dimension effect on mechanical behavior of a metallic curved micro-cantilever beam

Measurement ◽  
2011 ◽  
Vol 44 (2) ◽  
pp. 454-465 ◽  
Author(s):  
Alireza Shooshtari ◽  
Hamed Kalhori ◽  
Amirhasan Masoodian
Keyword(s):  
Mechanical Behavior ◽  
Cantilever Beam ◽  
Micro Cantilever
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