Effect of sputtering power and annealing temperature on the properties of indium tin oxide thin films prepared from radio frequency sputtering using powder target

2013 ◽  
Vol 24 (10) ◽  
pp. 3646-3651 ◽  
Author(s):  
Guisheng Zhu ◽  
Zupei Yang
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Annealing Temperature ◽  
Oxide Thin Films ◽  
Powder Target ◽  
Radio Frequency Sputtering ◽  
Sputtering Power

A statistical parameter study of indium tin oxide thin films deposited by radio-frequency sputtering

2005 ◽  
Vol 476 (1) ◽  
pp. 59-64 ◽  
Author(s):  
Seung-Ik Jun ◽  
Timothy E. McKnight ◽  
Michael L. Simpson ◽  
Philip D. Rack
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Statistical Parameter ◽  
Parameter Study ◽  
Oxide Thin Films ◽  
Radio Frequency Sputtering

Influences of Sputtering Power and Substrate Temperature on the Properties of RF Magnetron Sputtered Indium Tin Oxide Thin Films

1999 ◽  
Vol 38 (Part 1, No. 6A) ◽  
pp. 3448-3452 ◽  
Author(s):  
E. Terzini ◽  
G. Nobile ◽  
S. Loreti ◽  
C. Minarini ◽  
T. Polichetti ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Sputtering Power

Influence of annealing temperature and environment on the properties of indium tin oxide thin films

2005 ◽  
Vol 38 (12) ◽  
pp. 2000-2005 ◽  
Author(s):  
R X Wang ◽  
C D Beling ◽  
S Fung ◽  
A B Djurišić ◽  
C C Ling ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Annealing Temperature ◽  
Oxide Thin Films

Influence of Annealing Temperature on the Microstructure and Electrical Properties of Indium Tin Oxide Thin Films

2014 ◽  
Vol 27 (2) ◽  
pp. 368-372 ◽  
Author(s):  
Yinzhi Chen ◽  
Hongchuan Jiang ◽  
Shuwen Jiang ◽  
Xingzhao Liu ◽  
Wanli Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Annealing Temperature ◽  
Oxide Thin Films
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