A statistical parameter study of indium tin oxide thin films deposited by radio-frequency sputtering

2005 ◽  
Vol 476 (1) ◽  
pp. 59-64 ◽  
Author(s):  
Seung-Ik Jun ◽  
Timothy E. McKnight ◽  
Michael L. Simpson ◽  
Philip D. Rack
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Statistical Parameter ◽  
Parameter Study ◽  
Oxide Thin Films ◽  
Radio Frequency Sputtering

Plasma-assisted deposition of indium tin oxide thin films by sublimation using an anodic vacuum arc discharge

2021 ◽  
pp. 138731
Author(s):  
Bert Scheffel ◽  
Olaf Zywitzki ◽  
Thomas Preußner ◽  
Torsten Kopte
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Arc Discharge ◽  
Vacuum Arc ◽  
Oxide Thin Films

Study on the physical properties of indium tin oxide thin films deposited by microwave-assisted spray pyrolysis

2017 ◽  
Vol 728 ◽  
pp. 1338-1345 ◽  
Author(s):  
Lihua Zhang ◽  
Jianbo Lan ◽  
Jianyu Yang ◽  
Shenghui Guo ◽  
Jinhui Peng ◽  
...  
Keyword(s):  
Thin Films ◽  
Physical Properties ◽  
Spray Pyrolysis ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Microwave Assisted
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