Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes

2003 ◽  
Vol 32 (8) ◽  
pp. 890-898 ◽  
Author(s):  
Dong-Soo Yoon ◽  
Jae Sung Roh ◽  
Sung-Man Lee ◽  
Hong Koo Baik
Keyword(s):  
Thermal Stability ◽  
Titanium Nitride ◽  
Diffusion Barrier ◽  
Nitride Film ◽  
Titanium Nitride Film ◽  
Thermal Stability Of

Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects

2004 ◽  
Vol 76 (1-4) ◽  
pp. 76-81 ◽  
Author(s):  
L. Gao ◽  
J. Gstöttner ◽  
R. Emling ◽  
M. Balden ◽  
Ch. Linsmeier ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Titanium Nitride ◽  
Diffusion Barrier ◽  
Barrier Films ◽  
Thermal Stability Of

Thermal stability of PECVD W-B-N thin film as a diffusion barrier

1997 ◽  
Author(s):  
YongTae Kim ◽  
Dong J. Kim ◽  
Chang W. Lee ◽  
Jong-Wan Park
Keyword(s):  
Thin Film ◽  
Thermal Stability ◽  
Diffusion Barrier ◽  
Thermal Stability Of

scholarly journals Titanium Nitride Film Prepared by DC Titanium-Arc Plasma-Based Ion Implantation in Nitrogen.

1999 ◽  
Vol 75 (4) ◽  
pp. 426-431
Author(s):  
Masanori SANO ◽  
Ken YUKIMURA ◽  
Toshiro MARUYAMA ◽  
Shunji KUROOKA ◽  
Yasuo SUZUKI ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Titanium Nitride ◽  
Nitride Film ◽  
Arc Plasma ◽  
Titanium Nitride Film

Resistive Width of Superconducting Transition in Titanium Nitride Thin Film

2011 ◽  
Vol 6 (2) ◽  
pp. 50-56
Author(s):  
Svetlana V. Postolova ◽  
Alexey Yu. Mironov ◽  
Tatyana I. Baturina
Keyword(s):  
Transition Temperature ◽  
Titanium Nitride ◽  
Electron Interaction ◽  
Nitride Film ◽  
Superconducting Transition ◽  
Current Voltage ◽  
Current Voltage Characteristics ◽  
Superconducting Fluctuations ◽  
Width Of Superconducting Transition ◽  
Titanium Nitride Film

The transition to the superconducting state of the ultrathin (5 nm thick) titanium nitride film was studied. It is found that the nonmonotonic temperature dependence of the resistance, R(T), is a consequence of competition between the contributions to conductivity from quantum corrections stemming from the electron-electron interaction in the diffusion and Cooper channels. It is shown that the appreciable decrease in the resistance at T > Tc (Tc is the superconducting transition temperature) results from the superconducting fluctuations. We present the results of the analysis of low-temperature (T < Tc ) current-voltage characteristics V(I). It is found that they follow the power-law behavior V∝ I α(T) , with α(T) increasing rapidly with the decreasing temperature. The Berezinskii-Kosterlitz-Thouless transition temperature, TBKT, and width of the superconducting transition ∆T = Tc − TБКТ were determined

Thermal stability of ultra thin Zr-B-N films as diffusion barrier between Cu and Si

2020 ◽  
Vol 527 ◽  
pp. 146810
Author(s):  
Y. Meng ◽  
Z.X. Song ◽  
Y.H. Li ◽  
D. Qian ◽  
W. Hu ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Diffusion Barrier ◽  
Thermal Stability Of

Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis

2009 ◽  
Vol 54 (7) ◽  
pp. 1052-1057 ◽  
Author(s):  
I. V. Blonskii ◽  
A. A. Goncharov ◽  
A. V. Demchishin ◽  
A. N. Evsyukov ◽  
E. G. Kostin ◽  
...  
Keyword(s):  
Titanium Nitride ◽  
Gas Discharge ◽  
Optical Characteristics ◽  
Nitride Film ◽  
Plasma Dynamic ◽  
Film Synthesis ◽  
Titanium Nitride Film
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