Growth strains in thermally grown Al2O3 scales studied using synchrotron radiation

JOM ◽  
2009 ◽  
Vol 61 (7) ◽  
pp. 51-55 ◽  
Author(s):  
P. Y. Hou ◽  
A. P. Paulikas ◽  
B. W. Veal
2013 ◽  
Vol 53 (2) ◽  
pp. 286-293 ◽  
Author(s):  
Nobuo Otsuka ◽  
Takashi Doi ◽  
Yasuyoshi Hidaka ◽  
Yasuto Higashida ◽  
Yasuhiro Masaki ◽  
...  

2020 ◽  
Vol 174 ◽  
pp. 108796
Author(s):  
Jian Li ◽  
Guangming Cao ◽  
Hao Wang ◽  
Weina Zhang ◽  
Chenggang Li ◽  
...  

2004 ◽  
Vol 12 (1-3) ◽  
pp. 57-61 ◽  
Author(s):  
B. Panicaud ◽  
J.L. Grosseau-Poussard ◽  
P.O. Renault ◽  
J.F. Dinhut ◽  
D. Thiaudière ◽  
...  

Author(s):  
J. Liu ◽  
N. D. Theodore ◽  
D. Adams ◽  
S. Russell ◽  
T. L. Alford ◽  
...  

Copper-based metallization has recently attracted extensive research because of its potential application in ultra-large-scale integration (ULSI) of semiconductor devices. The feasibility of copper metallization is, however, limited due to its thermal stability issues. In order to utilize copper in metallization systems diffusion barriers such as titanium nitride and other refractory materials, have been employed to enhance the thermal stability of copper. Titanium nitride layers can be formed by annealing Cu(Ti) alloy film evaporated on thermally grown SiO2 substrates in an ammonia ambient. We report here the microstructural evolution of Cu(Ti)/SiO2 layers during annealing in NH3 flowing ambient.The Cu(Ti) films used in this experiment were prepared by electron beam evaporation onto thermally grown SiO2 substrates. The nominal composition of the Cu(Ti) alloy was Cu73Ti27. Thermal treatments were conducted in NH3 flowing ambient for 30 minutes at temperatures ranging from 450°C to 650°C. Cross-section TEM specimens were prepared by the standard procedure.


Author(s):  
B. Jouffrey ◽  
D. Dorignac ◽  
A. Bourret

Since the early works on GP zones and the model independently proposed by Preston and Guinier on the first steps of precipitation in supersaturated solid solution of aluminium containing a few percent of copper, many works have been performed to understand the structure of different stages in the sequence of precipitation.The scheme which is generally admitted can be drawn from a work by Phillips.In their original model Guinier and Preston analysed a GP zone as composed of a single (100) copperrich plane surrounded by aluminum atomic planes with a slightly shorter distance from the original plane than in the solid solution.From X-ray measurements it has also been shown that GP1 zones were not only copper monolayer zones. They could be up to a few atomic planes thick. Different models were proposed by Guinier, Gerold, Toman. Using synchrotron radiation, proposals have been recently made.


2005 ◽  
Vol 25 (1_suppl) ◽  
pp. S558-S558
Author(s):  
Masahiro Tamaki ◽  
Takashi Mizobe ◽  
Keiji Kidoguchi ◽  
Junnji Koyama ◽  
Takeshi Kondoh ◽  
...  

1973 ◽  
Vol 34 (C8) ◽  
pp. C8-63-C8-63
Author(s):  
J. BARRINGTON LEIGH ◽  
G. ROSENBAUM

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