Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

2011 ◽  
Vol 12 (4) ◽  
pp. 671-678 ◽  
Author(s):  
Kang-Won Lee ◽  
Young-Jin Noh ◽  
Wei Gao ◽  
Yoshikazu Arai ◽  
Yuki Shimizu ◽  
...  
Keyword(s):  
Experimental Investigation ◽  
Machine Surface ◽  
Displacement Sensor ◽  
Air Bearing ◽  
Surface Form ◽  
Micro Structures

Dynamic Response of an Air-Bearing Displacement Sensor for on-Machine Surface Form Measurement

2012 ◽  
Vol 523-524 ◽  
pp. 836-841 ◽  
Author(s):  
Kang Won Lee ◽  
So Ito ◽  
Yuki Shimizu ◽  
Wei Gao ◽  
Katsutoshi Tanaka ◽  
...  
Keyword(s):  
Dynamic Response ◽  
Measurement System ◽  
Machine Surface ◽  
Equation Of Motion ◽  
Displacement Sensor ◽  
Air Bearing ◽  
Surface Form ◽  
Mechanical Vibrations ◽  
Micro Structures ◽  
Measurement Efficiency

This paper presents the dynamic response of an air-bearing displacement sensor for on-machine surface form measurement of micro structures. The on-machine measurement system has some merits in terms of measurement efficiency and re-machining for error compensation after measurement. On the other hand, the performance of the contact type measurement system based on stylus methods is dominated by the dynamic characteristics of the system because the system is subject to random vibrations of the machine tool including the spindle during measurement. Therefore, the dynamic response of the system is useful for analyzing the mechanical vibrations of the practical on-machine measurement system. In this paper, the equation of motion for the air-bearing displacement sensor to the excited input displacement is derived and the displacement behavior of the system by using a PZT actuator is investigated within certain frequency ranges experimentally for identifying the dynamics of the system.

Improvement of an Air-Bearing Displacement Sensor with Nanometric Resolution

2012 ◽  
Vol 523-524 ◽  
pp. 945-950 ◽  
Author(s):  
So Ito ◽  
Kang Won Lee ◽  
Yuki Shimizu ◽  
Wei Gao
Keyword(s):  
Contact Force ◽  
Steel Ball ◽  
Displacement Sensor ◽  
Surface Measurement ◽  
Air Bearing ◽  
Surface Form ◽  
Micro Structures ◽  
Measuring Force

A contact stylus-type displacement sensor is proposed for a surface form measurement of micro-structures. The stylus is supported by an air-bearing, thus it can be moved smoothly without friction between the stylus and the air-bearing. In order to reduce the measurement force, a novel controlling technique of a contact force has been developed. During the measurement one edge of the stylus is maintained contact with the measured surface by its own weight. Another end of the stylus is connected with a counter weight by a string and the stylus is hanging on the string in order to reduce the contact force between the edge of the stylus and the measured surface. Measuring force is estimated to confirm the effectiveness of the counter weight. Surface measurement of a steel ball is carried out using the developed air-bearing displacement sensor.

Theoretical and Experimental Investigation of Intracavity Displacement-Sensor Based on All-Single-Mode Fiber

2021 ◽  
pp. 1-1
Author(s):  
Mingpan Bi ◽  
Haiwei Zhang ◽  
Yan Zhao ◽  
Lifang Xue ◽  
Pengbo Jiang ◽  
...  
Keyword(s):  
Experimental Investigation ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Displacement Sensor

scholarly journals Atomic-scale and experimental investigation on the micro-structures and mechanical properties of PLA blending with CMC for additive manufacturing

2019 ◽  
Vol 183 ◽  
pp. 108158 ◽  
Author(s):  
Qinghua Wei ◽  
Xianxuan Cai ◽  
Yuhong Guo ◽  
Guowei Wang ◽  
Ying Guo ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Experimental Investigation ◽  
Additive Manufacturing ◽  
Atomic Scale ◽  
Micro Structures

Experimental Investigation on Touch-Down/Take-Off of Air Bearing Slider in the Head/Disk Interface

2016 ◽  
Vol 22 (10) ◽  
pp. 3132-3136
Author(s):  
B. J Shi ◽  
Y. R Sun ◽  
J. D Ji ◽  
Z. L Wang
Keyword(s):  
Experimental Investigation ◽  
Air Bearing ◽  
Head Disk Interface ◽  
Disk Interface ◽  
Air Bearing Slider

Investigations on the Application of Elastomagnetic Abrasive Balls for Fine Finishing

2015 ◽  
Vol 137 (2) ◽  
Author(s):  
V. S. Sooraj ◽  
V. Radhakrishnan
Keyword(s):  
Magnetic Field ◽  
Experimental Investigation ◽  
Material Removal ◽  
Surface Form ◽  
Process Variables ◽  
Abrasive Grains ◽  
Flexible Mode ◽  
Major Process ◽  
Analysis Of Results ◽  
Viable Approach

This paper discusses a unique and flexible mode of applying fine abrasive grains in the form of mesoscale elastomagnetic abrasive balls, controlled using magnetic field, to achieve micro/nanoscale surface finish. The proposed balls are easy to load in the working gap to form an elastomagnetic abrasive brush that can be moved over the surface to get the required microcutting action. The effect of elastomeric medium present in the balls is clearly illustrated, and proven to be a viable approach for yielding ultra fine finish without altering the surface form. An analytical model is presented to describe the effect of finishing forces, torque, as well as the major process variables affecting the material removal. Detailed experimental investigation is reported with the statistical analysis of results and the validation of theoretical model.

Molecular dynamics simulation of elastic–plastic deformation associated with tool–workpiece contact in force sensor–integrated fast tool servo

2016 ◽  
Vol 232 (11) ◽  
pp. 1893-1902 ◽  
Author(s):  
Yindi Cai ◽  
Yuan-Liu Chen ◽  
Yuki Shimizu ◽  
So Ito ◽  
Wei Gao
Keyword(s):  
Molecular Dynamics ◽  
Machine Surface ◽  
Single Point ◽  
Force Sensor ◽  
Dynamics Simulation ◽  
Surface Form ◽  
Fast Tool Servo ◽  
Dynamics Model ◽  
Elastic Plastic ◽  
Diamond Cutting Tool

The tool–workpiece interactions when a single-point diamond cutting tool with specific tool edge geometry is made to contact with a copper workpiece are evaluated by the molecular dynamics simulations under different temperatures, boundary conditions and model sizes for ultra-precision microcutting and in-process surface form measurement based on a force sensor–integrated fast tool servo. It is confirmed that the proposed multi-relaxation time method is effective to stabilize the workpiece molecular dynamics model over a wide temperature range up to the room temperature under which a practical microcutting and on-machine surface form metrology process are conducted. The boundary condition and model size of the molecular dynamics model are then optimized to make reliable and cost-effective simulations for evaluation of the elastic–plastic transition contact depth and the corresponding contact force when a diamond tool with a practical edge sharpness of up to 30 nm is employed for microcutting and on-machine surface form metrology.

scholarly journals In Situ Measurement of Spindle Radial and Tilt Error Motions by Complementary Multi-probe Method

2019 ◽  
Vol 2 (4) ◽  
pp. 225-234 ◽  
Author(s):  
Fei Ding ◽  
Xichun Luo ◽  
Wenlong Chang ◽  
Zhengjian Wang
Keyword(s):  
Probe Method ◽  
Displacement Sensor ◽  
Air Bearing ◽  
Harmonic Suppression ◽  
Radial Error ◽  
Tilt Error ◽  
Measurement Results ◽  
Probe Angle ◽  
Measurement Approach

Abstract This paper presents a complementary multi-probe method for measurement of radial and tilt error motions of a spindle. Neither indexing of artefact nor rotating of spindle housing is required and thus make it suitable for in situ evaluation of spindle performance effectively. In order to minimize the harmonic suppression problems commonly encountered in the multi-probe measurement approach, three sets of probe angle combinations were optimized and the harmonics of the three measurements were extracted and composed to reveal the true artefact errors in a complementary way. The exact probe angles were identified by the correlation function of the probe signals after the sensors are mounted onto the fixture and the requirement of high-precision fixtures was alleviated. The evaluation of measurement results showed that the erroneous harmonics were greatly reduced by 70%. Using this method, the radial error motions of the precision air bearing spindle were measured at seven axial positions and then the synchronized tilts error motions were calculated. This demonstrated an effective approach for measuring four degree-of-freedom error motions in one setup with a small number of displacement sensor probes.

Experimental investigation of parameters influencing electrostatic motor’s performance with air bearing operation

2008 ◽  
Vol 43 (3-4) ◽  
pp. 211-216 ◽  
Author(s):  
Mohammad Dadkhah ◽  
Yousef Hojjat ◽  
Mehdi Modabberifar ◽  
Toshiro Higuchi
Keyword(s):  
Experimental Investigation ◽  
Air Bearing
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