scholarly journals Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy

2020 ◽  
Vol 3 (3) ◽  
pp. 167-186 ◽  
Author(s):  
Paven Thomas Mathew ◽  
Brian J. Rodriguez ◽  
Fengzhou Fang

Abstract Manufacturing at the atomic scale is the next generation of the industrial revolution. Atomic and close-to-atomic scale manufacturing (ACSM) helps to achieve this. Atomic force microscopy (AFM) is a promising method for this purpose since an instrument to machine at this small scale has not yet been developed. As the need for increasing the number of electronic components inside an integrated circuit chip is emerging in the present-day scenario, methods should be adopted to reduce the size of connections inside the chip. This can be achieved using molecules. However, connecting molecules with the electrodes and then to the external world is challenging. Foundations must be laid to make this possible for the future. Atomic layer removal, down to one atom, can be employed for this purpose. Presently, theoretical works are being performed extensively to study the interactions happening at the molecule–electrode junction, and how electronic transport is affected by the functionality and robustness of the system. These theoretical studies can be verified experimentally only if nano electrodes are fabricated. Silicon is widely used in the semiconductor industry to fabricate electronic components. Likewise, carbon-based materials such as highly oriented pyrolytic graphite, gold, and silicon carbide find applications in the electronic device manufacturing sector. Hence, ACSM of these materials should be developed intensively. This paper presents a review on the state-of-the-art research performed on material removal at the atomic scale by electrochemical and mechanical methods of the mentioned materials using AFM and provides a roadmap to achieve effective mass production of these devices.

1994 ◽  
Vol 33 (Part 2, No. 9B) ◽  
pp. L1292-L1294 ◽  
Author(s):  
Haruki Yokoyama ◽  
Masafumi Tanimoto ◽  
Masanori Shinohara ◽  
Naohisa Inoue

Science ◽  
1991 ◽  
Vol 251 (4999) ◽  
pp. 1343-1346 ◽  
Author(s):  
A. J. GRATZ ◽  
S. MANNE ◽  
P. K. HANSMA

1993 ◽  
Vol 8 (12) ◽  
pp. 3019-3022 ◽  
Author(s):  
Juai Ruan ◽  
Bharat Bhushan

Nanoindentation studies of sublimed fullerene films have been conducted using an atomic force microscope (AFM). Transfer of fullerene molecules from the as-deposited films to the AFM tip was observed during the indentation of AFM tip into some of the samples, whereas such a transfer was not observed for ion-bombarded films. The fullerene molecules transferred to the AFM tip were subsequently transported to a diamond surface when the diamond sample was scanned with the contaminated tip. This demonstrates the capability of material manipulation on a molecular scale using AFM. Atomic-scale friction of the fullerene films was measured to be low. Ability of fullerene films to form transfer film on the mating AFM tip surface may be partly responsible for low friction.


2000 ◽  
Vol 133 (1-4) ◽  
pp. 119-123 ◽  
Author(s):  
Mikko Utriainen ◽  
Hanna Lattu ◽  
Heli Viirola ◽  
Lauri Niinist� ◽  
Roland Resch ◽  
...  

2012 ◽  
Vol 76 (1) ◽  
pp. 227-253 ◽  
Author(s):  
E. Ruiz -Agudo ◽  
C. V. Putnis

AbstractAtomic force microscopy (AFM) enables in situ observations of mineral fluid reactions to be made at a nanoscale. During the past 20 years, the direct observation of mineral surfaces at molecular resolution during dissolution and growth has made significant contributions toward improvements in our understanding of the dynamics of mineral fluid reactions at the atomic scale. Observations and kinetic measurements of dissolution and growth from AFM experiments give valuable evidence for crystal dissolution and growth mechanisms, either confirming existing models or revealing their limitations. Modifications to theories can be made in the light of experimental evidence generated by AFM. Significant changes in the kinetics and mechanisms of crystallization and dissolution processes occur when the chemical and physical parameters of solutions, including the presence of impurity molecules or background electrolytes, are altered. Calcite has received considerable attention in AFM studies due to its central role in geochemical and biomineralization processes. This review summarizes the extensive literature on the dissolution and growth of calcite that has been generated by AFM studies, including the influence of fluid characteristics such as supersaturation, solution stoichiometry, pH, temperature and the presence of impurities.


1995 ◽  
Vol 3 (4) ◽  
pp. 6-7
Author(s):  
Stephen W. Carmichael

For biologic studies, atomic force microscopy (AFM) has been prevailing over scanning tunneling microscopy (STM) because it has the capability of imaging non-conducting biologic specimens. However, STM generally gives better resolution than AFM, and we're talking about resolution on the atomic scale. In a recent article, Franz Giessibl (Atomic resolution of the silicon (111)- (7X7) surface by atomic force microscopy, Science 267:68-71, 1995) has demonstrated that atoms can be imaged by AFM.


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