Thermodynamic analysis of metalorganic vapor phase epitaxy of III–V alloy semiconductors

1986 ◽  
Vol 74 (1) ◽  
pp. 172-180 ◽  
Author(s):  
Hisashi Seki ◽  
Akinori Koukitu
Keyword(s):  
Thermodynamic Analysis ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Alloy Semiconductors

scholarly journals Thermodynamic analysis of semipolar GaN and AlN under metalorganic vapor phase epitaxy growth conditions

2019 ◽  
Vol 58 (SC) ◽  
pp. SC1014 ◽  
Author(s):  
Yuki Seta ◽  
Abdul Muizz Pradipto ◽  
Toru Akiyama ◽  
Kohji Nakamura ◽  
Tomonori Ito ◽  
...  
Keyword(s):  
Thermodynamic Analysis ◽  
Vapor Phase ◽  
Growth Conditions ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Semipolar Gan

Thermodynamic analysis for nonpolar III-nitride surfaces under metalorganic vapor-phase epitaxy conditions

2020 ◽  
Vol 59 (2) ◽  
pp. 028003 ◽  
Author(s):  
Tsunashi Shimizu ◽  
Yuki Seta ◽  
Toru Akiyama ◽  
Abdul Muizz Pradipto ◽  
Kohji Nakamura ◽  
...  
Keyword(s):  
Thermodynamic Analysis ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy

Thermodynamic analysis of (0001) and $(000\bar{1})$ GaN metalorganic vapor phase epitaxy

2017 ◽  
Vol 56 (7) ◽  
pp. 070304 ◽  
Author(s):  
Akira Kusaba ◽  
Yoshihiro Kangawa ◽  
Pawel Kempisty ◽  
Hubert Valencia ◽  
Kenji Shiraishi ◽  
...  
Keyword(s):  
Thermodynamic Analysis ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy

Acceptor doping of (Al,Ga)As using carbon by metalorganic vapor phase epitaxy

1991 ◽  
Vol 107 (1-4) ◽  
pp. 268-273 ◽  
Author(s):  
M.A. Tischler ◽  
R.M. Potemski ◽  
T.F. Kuech ◽  
F. Cardone ◽  
M.S. Goorsky ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Acceptor Doping
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