A diffusion model for selective-area epitaxy by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(95)00008-9 ◽

1995 ◽

Vol 151 (1-2) ◽

pp. 204-212 ◽

Author(s):

Brian Korgel ◽

Robert F. Hicks

Keyword(s):

Chemical Vapor Deposition ◽

Diffusion Model ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Epitaxy ◽

Selective Area ◽

Metalorganic Chemical

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Selective area epitaxy by metalorganic chemical vapor deposition– a tool for photonic and novel nanostructure integration

Progress in Quantum Electronics ◽

10.1016/j.pquantelec.2020.100304 ◽

2020 ◽

pp. 100304

Author(s):

P. Daniel Dapkus ◽

Chun Yung Chi ◽

Sang Jun Choi ◽

Hyung Joon Chu ◽

Mitchell Dreiske ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Epitaxy ◽

Selective Area ◽

Nanostructure Integration ◽

Metalorganic Chemical

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Growth mechanisms and modeling for metalorganic chemical vapor deposition selective-area epitaxy on InP substrates

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582242 ◽

2000 ◽

Vol 18 (2) ◽

pp. 648-651 ◽

Author(s):

J. E. Greenspan ◽

X. Zhang ◽

N. Puetz ◽

B. Emmerstorfer

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Growth Mechanisms ◽

Selective Area Epitaxy ◽

Selective Area ◽

Inp Substrates ◽

Metalorganic Chemical

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Selective area growth of InP on lithography-free, nanopatterned GaAs(001) by metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4855035 ◽

2014 ◽

Vol 32 (1) ◽

pp. 011210 ◽

Author(s):

Qi Wang ◽

Zhiqiang Bian ◽

Zhigang Jia ◽

Zhihong Pan ◽

Shiwei Cai ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Nanopores and quantum dots by selective area metalorganic chemical vapor deposition

IEEE Photonics Conference 2012 ◽

10.1109/ipcon.2012.6358853 ◽

2012 ◽

Author(s):

J.J. Coleman

Keyword(s):

Quantum Dots ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area ◽

Metalorganic Chemical

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Hexagonal-Facet Laser with Optical Waveguides Grown by Selective Area Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.l4 ◽

1995 ◽

Vol 34 (Part 2, No. 1A) ◽

pp. L4-L6 ◽

Author(s):

Seigo Ando ◽

Naoki Kobayashi ◽

Hiroaki Ando

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Optical Waveguides ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area ◽

Metalorganic Chemical

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Surface‐diffusion model in selective metalorganic chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.351900 ◽

1992 ◽

Vol 72 (12) ◽

pp. 5919-5925 ◽

Author(s):

Ko‐ichi Yamaguchi ◽

Masaaki Ogasawara ◽

Kotaro Okamoto

Keyword(s):

Chemical Vapor Deposition ◽

Surface Diffusion ◽

Diffusion Model ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical

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Mechanism of selective area growth of GaN nanorods by pulsed mode metalorganic chemical vapor deposition

Nanotechnology ◽

10.1088/0957-4484/23/46/465601 ◽

2012 ◽

Vol 23 (46) ◽

pp. 465601 ◽

Author(s):

Yen-Ting Lin ◽

Ting-Wei Yeh ◽

P Daniel Dapkus

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Pulsed Mode ◽

Area Growth ◽

Metalorganic Chemical

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Formation of macroscopic steps during selective area metalorganic chemical vapor deposition on GaAs (0 0 1) vicinal substrates

Journal of Crystal Growth ◽

10.1016/s0022-0248(96)00846-9 ◽

1997 ◽

Vol 177 (1-2) ◽

pp. 33-40

Author(s):

Hyunchol Shin ◽

Young-Se Kwon

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area ◽

Metalorganic Chemical

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GaAs tetrahedral quantum dot structures fabricated using selective area metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.105026 ◽

1991 ◽

Vol 58 (18) ◽

pp. 2018-2020 ◽

Author(s):

T. Fukui ◽

S. Ando ◽

Y. Tokura ◽

T. Toriyama

Keyword(s):

Chemical Vapor Deposition ◽

Quantum Dot ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area ◽

Metalorganic Chemical

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Novel Hexagonal-Facet GaAs/AlGaAs Laser Grown by Selective Area Metalorganic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l1293 ◽

1993 ◽

Vol 32 (Part 2, No. 9B) ◽

pp. L1293-L1296 ◽

Author(s):

Seigo Ando ◽

Naoki Kobayashi ◽

Hiroaki Ando

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area ◽

Metalorganic Chemical

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