Growth mechanisms and modeling for metalorganic chemical vapor deposition selective-area epitaxy on InP substrates

2000 ◽  
Vol 18 (2) ◽  
pp. 648-651 ◽  
Author(s):  
J. E. Greenspan ◽  
X. Zhang ◽  
N. Puetz ◽  
B. Emmerstorfer
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Mechanisms ◽  
Selective Area Epitaxy ◽  
Selective Area ◽  
Inp Substrates ◽  
Metalorganic Chemical

A modified metalorganic chemical vapor deposition chemistry for improved selective area regrowth

1993 ◽  
Vol 131 (1-2) ◽  
pp. 204-208 ◽  
Author(s):  
R.F. Karlicek ◽  
D.L. Coblentz ◽  
R.A. Logan ◽  
T.R. Hayes ◽  
R. Pawelek ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Area ◽  
Metalorganic Chemical
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