Chemical vapour deposition coating of crystalline Si3N4 on a quartz crucible for nitrogen-doped Czochralski silicon crystal growth
1988 ◽
Vol 105-106
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pp. 465-480
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1983 ◽
Vol 61
(2)
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pp. 245-258
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1997 ◽
Vol 171
(3-4)
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pp. 333-340
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2014 ◽
Vol 16
(36)
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pp. 19446
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2014 ◽
Vol 2
(35)
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pp. 7396
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Keyword(s):
Keyword(s):
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