X-ray diffraction peak profile analysis of TiNx films prepared on silicon by reactive ion beam assisted deposition

1991 ◽  
Vol 195 (1-2) ◽  
pp. 213-224 ◽  
Author(s):  
P. Scardi ◽  
D.C. Kothari ◽  
L. Guzman
1997 ◽  
Vol 12 (5) ◽  
pp. 1191-1194 ◽  
Author(s):  
D. N. Dunn ◽  
L. E. Seitzman ◽  
I. L. Singer

The origin of a previously reported anomalous low 2θ x-ray diffraction peak from MoS2 thin films grown by ion beam assisted deposition was investigated. The anomalous peak, observed in a film grown on Si(100), was removed by ion irradiating the film with 180 keV Ar++ ions to a dose of 1 × 1015 ions/cm2. Microstructures of the two films were investigated using x-ray diffraction and cross-section transmission electron microscopy. Diffraction data and bright-field images indicated that the low 2θ peak was due to a local interplanar expansion of the crystal structure normal to MoS2 basal planes. This expansion was attributed to molecular defects.


1993 ◽  
Vol 316 ◽  
Author(s):  
W. A. Lewis ◽  
M. Farle ◽  
B. M. Clemens ◽  
R. L. White

ABSTRACTWe report the results of our microstructural investigations into the origin of in-plane uniaxial magnetic anisotropies induced in Ni and Fe thin films by low energy ion beam assisted deposition. 1000 Å films were prepared by ion beam sputtering onto amorphous silica substrates under simultaneous bombardment by 100 eV Xe+ ions under an oblique angle of incidence. The induced anisotropy is studied as a function of ion-to-adsorbate atom arrival ratio, R, from values of 0 to 0.35. The maximum anisotropy field is 150 Oe for Ni and 80 Oe for Fe, but their hard axes are oriented orthogonal to each other. Asymmetric x-ray diffraction is employed to study both in-plane and out-of-plane lattice spacings and crystallographic orientation. In agreement with previous work, we find evidence of a anisotropic in-plane strain of magnitude 0.2-0.5%. In all films, the direction perpendicular to the ion bombardment is compressed relative to parallel. The uniaxial magnetic anisotropy is correlated with this in-plane anisotropic strain using a simple magnetoelastic model.


Author(s):  
M Cao ◽  
L Dong ◽  
G Q Liu ◽  
D J Li

ZrN/(Ti, Al)N nanometre multi-layered coatings with different modulation ratios and ion beam fluxes have been synthesized by ion-beam-assisted deposition at room temperature. X-ray diffraction (XRD), a nano indenter, and a profiler were used to characterize the microstructure and mechanical properties of the coatings. The small-angle XRD pattern indicated a well-defined composition modulation and layer structure. The XRD pattern showed a significant mixture of strong ZrN(111) and (Ti,Al)N(111) textures. At an assisted beam flux of 5 mA and modulation ratio of 2:3, the ZrN/(Ti,Al)N multi-layer possessed the highest hardness (30.1GPa) and elastic modulus (361GPa). Its fracture resistance, and residual stress also showed the best results.


2008 ◽  
Vol 516 (22) ◽  
pp. 8117-8124 ◽  
Author(s):  
M.R. Movaghar Garabagh ◽  
S. Hossein Nedjad ◽  
H. Shirazi ◽  
M. Iranpour Mobarekeh ◽  
M. Nili Ahmadabadi

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