Smooth diamond film deposition by a. c. discharge plasma chemical vapor deposition

1991 ◽  
Vol 206 (1-2) ◽  
pp. 204-207 ◽  
Author(s):  
S.Y. Choi ◽  
C.J. Zhang ◽  
G.S. Lee
Keyword(s):  
Chemical Vapor Deposition ◽  
Diamond Film ◽  
Vapor Deposition ◽  
Discharge Plasma ◽  
Chemical Vapor ◽  
Film Deposition ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

Intermittent growth of a diamond film by direct current hot cathode plasma chemical vapor deposition

Carbon ◽  
2013 ◽  
Vol 51 ◽  
pp. 437 ◽  
Author(s):  
Hong-wei Jiang ◽  
Hai-liang Huang ◽  
Xiang-hua Jia ◽  
Long-cheng Yin ◽  
Yu-qiang Chen ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Direct Current ◽  
Diamond Film ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Cathode Plasma ◽  
Plasma Chemical Vapor Deposition

Fabrication of a micro-patterned diamond film by site-selective plasma chemical vapor deposition

1998 ◽  
Vol 334 (1-2) ◽  
pp. 161-164 ◽  
Author(s):  
Yukihiro Sakamoto ◽  
Matsufumi Takaya ◽  
Hiroyuki Sugimura ◽  
Osamu Takai ◽  
Nobuyuki Nakagiri
Keyword(s):  
Chemical Vapor Deposition ◽  
Diamond Film ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Site Selective

Formation of Diamond Films by Intermittent Discharge Plasma Chemical Vapor Deposition

1994 ◽  
Vol 33 (Part 1, No. 7B) ◽  
pp. 4400-4403 ◽  
Author(s):  
Mikio Noda ◽  
Hiroshi Kusakabe ◽  
Kazuya Taniguchi ◽  
Shigeo Maruno
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Discharge Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition
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