In situ spectroscopic ellipsometry studies of interfaces of thin films deposited by PECVD

1994 ◽  
Vol 241 (1-2) ◽  
pp. 234-239 ◽  
Author(s):  
B. Drévillon
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry

Etching of a-Si:H thin films by hydrogen plasma: A view from in situ spectroscopic ellipsometry

2014 ◽  
Vol 141 (8) ◽  
pp. 084708 ◽  
Author(s):  
Aomar Hadjadj ◽  
Fadila Larbi ◽  
Mickaël Gilliot ◽  
Pere Roca i Cabarrocas
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Hydrogen Plasma

scholarly journals Dealing with inaccuracies in the analysis on solvent-induced swelling of transparent thin films using in situ spectroscopic ellipsometry in the visible wavelength range

2016 ◽  
Vol 49 (6) ◽  
pp. 538-547 ◽  
Author(s):  
Kristianne Tempelman ◽  
Emiel J. Kappert ◽  
Michiel J.T. Raaijmakers ◽  
Herbert Wormeester ◽  
Nieck E. Benes
Keyword(s):  
Thin Films ◽  
Wavelength Range ◽  
Spectroscopic Ellipsometry ◽  
Visible Wavelength ◽  
Visible Wavelength Range

In situ spectroscopic ellipsometry study of the hydrogenation process of switchable mirrors based on magnesium-nickel alloy thin films

2010 ◽  
Vol 107 (4) ◽  
pp. 043517 ◽  
Author(s):  
Y. Yamada ◽  
S. Bao ◽  
K. Tajima ◽  
M. Okada ◽  
M. Tazawa ◽  
...  
Keyword(s):  
Thin Films ◽  
Nickel Alloy ◽  
Spectroscopic Ellipsometry ◽  
Hydrogenation Process

In-operando spectroscopic ellipsometry studies of IrO2 dynamic instabilities: Guide to in-situ growth of pyrochlore iridate thin films

2019 ◽  
Vol 19 (4) ◽  
pp. 400-405 ◽  
Author(s):  
Woo Jin Kim ◽  
Eun Kyo Ko ◽  
So Yeun Kim ◽  
Bongju Kim ◽  
Tae Won Noh
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
In Situ Growth ◽  
In Operando

Atomic layer-by-layer MOCVD of high-k dielectric thin films with in-situ monitoring by spectroscopic ellipsometry

2002 ◽  
Author(s):  
Yoshishige Tsuchiya ◽  
Masato Endoh ◽  
Masatoshi Kurosawa ◽  
Raymond T. Tung ◽  
Takeo Hattori ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Layer By Layer ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

Top injection reactor tool with in situ spectroscopic ellipsometry for growth and characterization of ALD thin films

2008 ◽  
Vol 85 (3) ◽  
pp. 527-533 ◽  
Author(s):  
D. Schmidt ◽  
S. Strehle ◽  
M. Albert ◽  
W. Hentsch ◽  
J.W. Bartha
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry

In-situ spectroscopic ellipsometry to control the growth of Ti nitride and carbide thin films

1995 ◽  
Vol 86 (1-4) ◽  
pp. 185-189 ◽  
Author(s):  
S. Logothetidis ◽  
I. Alexandrou ◽  
J. Stoemenos
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry
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