Chemical and electrical characteristics of low temperature plasma enhanced CVD silicon oxide films using Si2H6 and N2O

1995 ◽  
Vol 270 (1-2) ◽  
pp. 512-516 ◽  
Author(s):  
Juho Song ◽  
G.S. Lee ◽  
P.K. Ajmera
Keyword(s):  
Low Temperature ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Electrical Characteristics ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Plasma Enhanced Cvd

scholarly journals Low temperature plasma enhanced CVD epitaxial growth of silicon on GaAs: a new paradigm for III-V/Si integration

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Romain Cariou ◽  
Wanghua Chen ◽  
Jean-Luc Maurice ◽  
Jingwen Yu ◽  
Gilles Patriarche ◽  
...  
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Low Temperature Plasma ◽  
New Paradigm ◽  
Temperature Plasma ◽  
Plasma Enhanced Cvd

Structure and properties of zinc oxide films deposited in the recombination burning zone of a low-temperature plasma

2007 ◽  
Vol 52 (5) ◽  
pp. 663-665 ◽  
Author(s):  
E. I. Burylin ◽  
A. G. Veselov ◽  
A. S. Dzhumaliev ◽  
V. I. Elmanov ◽  
S. N. Istomin ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Oxide Films ◽  
Structure And Properties ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Zinc Oxide Films ◽  
Burning Zone

scholarly journals Direct synthesis of graphene on silicon oxide by low temperature plasma enhanced chemical vapor deposition

Nanoscale ◽  
2018 ◽  
Vol 10 (26) ◽  
pp. 12779-12787 ◽  
Author(s):  
Roberto Muñoz ◽  
Lidia Martínez ◽  
Elena López-Elvira ◽  
Carmen Munuera ◽  
Yves Huttel ◽  
...  
Keyword(s):  
Low Temperature ◽  
Silicon Oxide ◽  
Direct Synthesis ◽  
Chemical Vapor ◽  
Native Oxide ◽  
Monolayer Graphene ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Graphene Films ◽  
Free Growth

Direct, low temperature, catalyst-free and transfer-free growth of monolayer graphene films on silicon wafer with a native oxide.

Synthesis of Electrically Conducting Tin Films by Low-Temperature, Plasma-Enhanced CVD

2009 ◽  
Vol 21 (19) ◽  
pp. 4442-4447 ◽  
Author(s):  
Dattatray S Wavhal ◽  
Swati Goyal ◽  
Richard B Timmons
Keyword(s):  
Low Temperature ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Tin Films ◽  
Plasma Enhanced Cvd ◽  
Electrically Conducting
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