Low temperature plasma enhanced chemical vapor deposition of fluorinated silicon oxide films as an interlayer dielectric
1997 ◽
Vol 15
(5)
◽
pp. 1843
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1995 ◽
Vol 24
(10)
◽
pp. 1507-1510
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2006 ◽
Vol 10
(3)
◽
pp. 457-466
2001 ◽
Vol 40
(Part 1, No. 1)
◽
pp. 44-48
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1989 ◽
Vol 39
(1-4)
◽
pp. 135-140
◽
1998 ◽
Vol 37
(Part 1, No. 12A)
◽
pp. 6562-6568
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2017 ◽
Vol 11
(1)
◽
pp. 226-233
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1998 ◽
Vol 227-230
◽
pp. 861-865
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2006 ◽
Vol 596
(2)
◽
pp. 124-130
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1994 ◽
Vol 12
(4)
◽
pp. 1365-1370
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