4128. Electron-beam lithographic pattern generation system. (USA)

Vacuum ◽  
1979 ◽  
Vol 29 (8-9) ◽  
pp. 331
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Generation System

Electron‐beam lithographic pattern generation system

1978 ◽  
Vol 15 (3) ◽  
pp. 874-877 ◽  
Author(s):  
A. M. Patlach ◽  
P. R. Jaskar ◽  
T. W. Studwell
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Generation System

A Fast Turn Around Electron-Beam Pattern Generation System

1973 ◽  
Vol 10 (6) ◽  
pp. 1016-1019 ◽  
Author(s):  
B. P. Piwczyk ◽  
K. G. McQuhae
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Beam Pattern ◽  
Generation System

A pattern generation technique for serial electron‐beam microfabrication systems

1975 ◽  
Vol 12 (6) ◽  
pp. 1246-1250 ◽  
Author(s):  
F. S. Ozdemir ◽  
C. R. Buckey ◽  
E. D. Wolf
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Generation Technique

scholarly journals Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

2018 ◽  
Vol 9 ◽  
pp. 2581-2598 ◽  
Author(s):  
Lukas Keller ◽  
Michael Huth
Keyword(s):  
Electron Beam ◽  
3D Structure ◽  
Three Dimensional ◽  
Pattern Generation ◽  
Proximity Effects ◽  
Writing Strategies ◽  
Direct Write ◽  
Nanoscale Structures ◽  
Geometrical Description ◽  
Electron Beam Induced Deposition

Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics. However, the generation of suitable pattern files that control the electron beam’s movement, and thereby reliably map the desired target 3D structure from a purely geometrical description to a shape-conforming 3D deposit, is nontrivial. To address this issue we developed several writing strategies and associated algorithms implemented in C++. Our pattern file generator handles different proximity effects and corrects for height-dependent precursor coverage. Several examples of successful 3D nanoarchitectures using different precursors are presented that validate the effectiveness of the implementation.

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