Fundamental properties of helium inductively coupled plasmas measured by high-resolution Fourier transform spectrometry

1994 ◽  
Vol 49 (11) ◽  
pp. 1081-1095 ◽  
Author(s):  
Mingxiang Cai ◽  
Izumi Ishii ◽  
R.H. Clifford ◽  
Akbar Montaser ◽  
B.A. Palmer ◽  
...  
Keyword(s):  
Fourier Transform ◽  
High Resolution ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Fourier Transform Spectrometry ◽  
Fundamental Properties ◽  
Coupled Plasmas

High resolution pattern transfer in III-nitrides using BCl3/Ar inductively coupled plasmas

1998 ◽  
Vol 42 (9) ◽  
pp. 1719-1722
Author(s):  
Hyun Cho ◽  
S.M Donovan ◽  
J.D MacKenzie ◽  
C.R Abernathy ◽  
S.J Pearton ◽  
...  
Keyword(s):  
High Resolution ◽  
Pattern Transfer ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

2020 ◽  
Vol 128 (8) ◽  
pp. 089901
Author(s):  
Chenhui Qu ◽  
Steven J. Lanham ◽  
Steven C. Shannon ◽  
Sang Ki Nam ◽  
Mark J. Kushner
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Power Matching ◽  
Coupled Plasmas

Etching characteristics of ZnO thin films in chlorine-containing inductively coupled plasmas

2006 ◽  
Vol 83 (2) ◽  
pp. 328-335 ◽  
Author(s):  
S.W. Na ◽  
M.H. Shin ◽  
Y.M. Chung ◽  
J.G. Han ◽  
S.H. Jeung ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

2003 ◽  
Vol 10 (4) ◽  
pp. 1146-1151 ◽  
Author(s):  
K. Ostrikov ◽  
E. Tsakadze ◽  
S. Xu ◽  
S. V. Vladimirov ◽  
R. Storer
Keyword(s):  
Electromagnetic Fields ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Inductively Coupled Plasmas

1974 ◽  
Vol 46 (13) ◽  
pp. 1155A-1162A ◽  
Author(s):  
Velmer A. Fassel ◽  
Richard N. Kniseley
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
Sign in / Sign up

Export Citation Format

Share Document