Diamond growth on silicon nitride by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/0925-9635(92)90107-y ◽

1992 ◽

Vol 1 (7) ◽

pp. 818-823 ◽

Author(s):

M.C. Salvadori ◽

J.W. Ager ◽

I.G. Brown

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Textured diamond growth by microwave plasma chemical vapor deposition

Applied Surface Science ◽

10.1016/0169-4332(95)00212-x ◽

1996 ◽

Vol 92 ◽

pp. 115-118 ◽

Author(s):

Yung Liou

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Homoepitaxial diamond growth by high-power microwave-plasma chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2004.08.005 ◽

2004 ◽

Vol 271 (3-4) ◽

pp. 409-419 ◽

Author(s):

Tokuyuki Teraji ◽

Toshimichi Ito

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

High Power Microwave ◽

Plasma Chemical Vapor Deposition ◽

Power Microwave

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Growth and characterization of silicon nitride films produced by remote microwave plasma chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577211 ◽

1991 ◽

Vol 9 (5) ◽

pp. 2594-2601 ◽

Author(s):

D. Landheer ◽

N. G. Skinner ◽

T. E. Jackman ◽

D. A. Thompson ◽

J. G. Simmons ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Silicon Nitride Films

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Diamond growth on CoSi2/Si by bias-enhanced microwave plasma chemical vapor deposition method

Materials Chemistry and Physics ◽

10.1016/s0254-0584(01)00430-8 ◽

2001 ◽

Vol 72 (2) ◽

pp. 172-175 ◽

Author(s):

Mao Rong Chen ◽

Li Chang ◽

Der Fu Chang ◽

Hou Guang Chen

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Parameter window of diamond growth on GaN films by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2008.02.011 ◽

2008 ◽

Vol 17 (7-10) ◽

pp. 1775-1779 ◽

Author(s):

Dipti Ranjan Mohapatra ◽

Padmnabh Rai ◽

Abha Misra ◽

Pawan K. Tyagi ◽

Brajesh S. Yadav ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Investigation of diamond growth at high pressure by microwave plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2003.11.034 ◽

2004 ◽

Vol 13 (4-8) ◽

pp. 604-609 ◽

Author(s):

V. Mortet ◽

A. Kromka ◽

R. Kravets ◽

J. Rosa ◽

V. Vorlicek ◽

...

Keyword(s):

High Pressure ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Textured diamond growth on (100) β‐SiC via microwave plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.106541 ◽

1992 ◽

Vol 60 (6) ◽

pp. 698-700 ◽

Author(s):

B. R. Stoner ◽

J. T. Glass

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Heteroepitaxial diamond growth on 4H-SiC using microwave plasma chemical vapor deposition

Heliyon ◽

10.1016/j.heliyon.2017.e00404 ◽

2017 ◽

Vol 3 (9) ◽

pp. e00404 ◽

Author(s):

Eric Moore ◽

Joshua Jarrell ◽

Lei Cao

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Boron‐Doped Single‐Crystal Diamond Growth on Heteroepitaxial Diamond Substrate Using Microwave Plasma Chemical Vapor Deposition

physica status solidi (a) ◽

10.1002/pssa.201900973 ◽

2020 ◽

Vol 217 (12) ◽

pp. 1900973

Author(s):

Taemyung Kwak ◽

Jonggun Lee ◽

Geunho Yoo ◽

Heejin Shin ◽

Uiho Choi ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Diamond Substrate ◽

Single Crystal Diamond

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Nucleation-enhancing treatment for diamond growth over a large-area using magnetoactive microwave plasma chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1287411 ◽

2000 ◽

Vol 88 (5) ◽

pp. 2979-2983 ◽

Author(s):

Hyeongmin Jeon ◽

Chunlei Wang ◽

Akimitsu Hatta ◽

Toshimichi Ito

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Diamond Growth ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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