PREPARATION AND CHARACTERIZATION OF WIDE AREA, HIGH QUALITY DIAMOND FILM USING MAGNETOACTIVE PLASMA CHEMICAL VAPOUR DEPOSITION

1990 ◽  
pp. 10-21 ◽  
Author(s):  
AKIO HIRAKI ◽  
HIROSHI KAWARADA ◽  
JIN WEI ◽  
JUN-ICHI SUZUKI
Keyword(s):  
Chemical Vapour Deposition ◽  
Diamond Film ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Magnetoactive Plasma ◽  
Wide Area ◽  
Plasma Chemical ◽  
High Quality ◽  
Plasma Chemical Vapour Deposition

Diamond film growth by pulse-modulated magnetoactive microwave plasma chemical vapour deposition

1996 ◽  
Vol 281-282 ◽  
pp. 264-266 ◽  
Author(s):  
Akimitsu Hatta ◽  
Hidetoshi Suzuki ◽  
Ken-ichi Kadota ◽  
Toshimichi Ito ◽  
Akio Hiraki
Keyword(s):  
Chemical Vapour Deposition ◽  
Diamond Film ◽  
Vapour Deposition ◽  
Film Growth ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Diamond Film Growth
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