Kinetics and mechanisms of stress relaxation in sputtered silver thin films

Stress Relaxation and the Formation of Silicides in the Process of the Crystallization of NI-NB Films on SI

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100088804 ◽

1991 ◽

Vol 49 ◽

pp. 898-899

Author(s):

N. Rozhanski ◽

V. Lifshitz

Keyword(s):

Thin Films ◽

Stress Relaxation ◽

Integrated Circuits ◽

Direct Evidence ◽

Alloy Film ◽

Diffusion Barriers ◽

Effective Barrier

Thin films of amorphous Ni-Nb alloys are of interest since they can be used as diffusion barriers for integrated circuits on Si. A native SiO2 layer is an effective barrier for Ni diffusion but it deformation during the crystallization of the alloy film lead to the appearence of diffusion fluxes through it and the following formation of silicides. This study concerns the direct evidence of the action of stresses in the process of the crystallization of Ni-Nb films on Si and the structure of forming NiSi2 islands.

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Tensile and fatigue behavior of polymer supported silver thin films at elevated temperatures

Materials Letters ◽

10.1016/j.matlet.2017.01.111 ◽

2017 ◽

Vol 193 ◽

pp. 81-84 ◽

Cited By ~ 6

Author(s):

Yong-Seok Lee ◽

Gi-Dong Sim ◽

Jong-Soo Bae ◽

Ji-Young Kim ◽

Soon-Bok Lee

Keyword(s):

Thin Films ◽

Elevated Temperatures ◽

Fatigue Behavior ◽

Polymer Supported ◽

Silver Thin Films

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The Elastic Moduli of Silver Thin Films Measured with a New Microtensile Tester

MRS Proceedings ◽

10.1557/proc-239-239 ◽

1991 ◽

Vol 239 ◽

Cited By ~ 1

Author(s):

J. Ruud ◽

D. Josell ◽

A. L. Greer ◽

F. Spaepen

Keyword(s):

Thin Film ◽

Thin Films ◽

Diffraction Grating ◽

Strain Measurement ◽

Elastic Moduli ◽

Two Dimensional ◽

Bulk Crystals ◽

Free Standing ◽

Tensile Direction ◽

Silver Thin Films

ABSTRACTA new design for a thin film microtensile tester is presented. The strain is measured directly on the free-standing thin film from the displacement of laser spots diffracted from a thin grating applied to its surface by photolithography. The diffraction grating is two-dimensional, allowing strain measurement both along and transverse to the tensile direction. In principle, both Young's modulus and Poisson's ratio of a thin film can be determined. Ag thin films with strong <111> texture were tested. The measured Young moduli agreed with those measured on bulk crystals, but the measured Poisson ratios were low, most likely due to slight transverse folding of the film that developed during the test.

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