scholarly journals Improved durability and activity of Pt/C catalysts through atomic layer deposition of tungsten nitride and subsequent thermal treatment

2019 ◽  
Vol 254 ◽  
pp. 587-593 ◽  
Author(s):  
W. Wilson McNeary ◽  
Sarah F. Zaccarine ◽  
Annika Lai ◽  
Audrey E. Linico ◽  
Svitlana Pylypenko ◽  
...  
Keyword(s):  
Thermal Treatment ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tungsten Nitride ◽  
Subsequent Thermal Treatment ◽  
Layer Deposition

scholarly journals Atomic layer deposition of tungsten nitride films as protective barriers to hydrogen

2020 ◽  
Vol 507 ◽  
pp. 145019
Author(s):  
Sarah K. Bull ◽  
W. Wilson McNeary ◽  
Cynthia A. Adkins ◽  
Theodore A. Champ ◽  
Chanel A. Hill ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tungsten Nitride ◽  
Layer Deposition

A low valent metalorganic precursor for the growth of tungsten nitride thin films by atomic layer deposition

2007 ◽  
Vol 17 (11) ◽  
pp. 1109 ◽  
Author(s):  
Charles L. Dezelah ◽  
Oussama M. El-Kadri ◽  
Kaupo Kukli ◽  
Kai Arstila ◽  
Ronald J. Baird ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tungsten Nitride ◽  
Layer Deposition ◽  
Low Valent

Plasma-enhanced atomic layer deposition of tungsten nitride

2016 ◽  
Vol 34 (5) ◽  
pp. 051516 ◽  
Author(s):  
Mark J. Sowa ◽  
Yonas Yemane ◽  
Fritz B. Prinz ◽  
J Provine
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tungsten Nitride ◽  
Layer Deposition

The role of ammonia in atomic layer deposition of tungsten nitride

2007 ◽  
Vol 90 (17) ◽  
pp. 173120 ◽  
Author(s):  
Atashi B. Mukhopadhyay ◽  
Charles B. Musgrave
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Tungsten Nitride ◽  
Layer Deposition
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