Temperature dependence of the sticking coefficient in atomic layer deposition
2010 ◽
Vol 256
(12)
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pp. 3778-3782
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Keyword(s):
2017 ◽
Vol 35
(1)
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pp. 01B127
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Keyword(s):
2007 ◽
Vol 50
(6)
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pp. 1827
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2014 ◽
Vol 211
(9)
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pp. 2166-2171
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Keyword(s):
2017 ◽
Vol 35
(1)
◽
pp. 01B119
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Keyword(s):
2009 ◽
Vol 255
(13-14)
◽
pp. 6620-6623
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Keyword(s):
2007 ◽
Vol 94
(1)
◽
pp. 11-20
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Keyword(s):
2020 ◽
Vol 536
◽
pp. 125568
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