Effect of radio frequency power on the inductively coupled plasma etched Al0.65Ga0.35N surface

2010 ◽  
Vol 256 (21) ◽  
pp. 6254-6258 ◽  
Author(s):  
Y. Bai ◽  
J. Liu ◽  
P. Ma ◽  
B. Li ◽  
J. Zhu ◽  
...  
1982 ◽  
Vol 36 (6) ◽  
pp. 627-631 ◽  
Author(s):  
R. Rezaaiyaan ◽  
G. M. Hieftje ◽  
H. Anderson ◽  
H. Kaiser ◽  
B. Meddings

A detailed study of the importance of various spatial dimensions in an ICP torch is described. Of the various dimensions which were examined, the annular spacing between the coolant (outer) and plasma (flared) tube is the most critical for plasma stabilization at low argon coolant flows and applied radio-frequency powers. Similarly, the inner diameter of the aerosol injection tube was found to be important, with the value of 1.0 mm chosen for a compromise between low-power, low-flow capability and routine analysis of high-solids sample solutions. A constriction at the inlet of the coolant argon was found not to affect plasma stability greatly, but altered significantly the applied powers and coolant flows which were necessary for plasma ignition. With these and other torch dimensions optimized, it was found to be possible to ignite a plasma at a coolant flow of 5 L/min and an applied radio frequency power of 450 W. Continued operation of the plasma during analysis of real samples or during aspiration of a 1% NaCl solution was found to be possible alternatively at 500 W (rf power) and 3.5 L/min coolant argon or 125 W and 5.5 L/min, respectively.


Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 834
Author(s):  
Nan Yu ◽  
Renaud Jourdain ◽  
Mustapha Gourma ◽  
Fangda Xu ◽  
Adam Bennett ◽  
...  

This paper focuses on the power dissipation of a plasma torch used for an optical surface fabrication process. The process utilizes an inductively coupled plasma (ICP) torch that is equipped with a De-Laval nozzle for the delivery of a highly collimated plasma jet. The plasma torch makes use of a self-igniting coil and an intermediate co-axial tube made of alumina. The torch has a distinctive thermal and electrical response compared to regular ICP torches. In this study, the results of the power dissipation investigation reveal the true efficiency of the torch and discern its electrical response. By systematically measuring the coolant parameters (temperature change and flow rate), the power dissipation is extrapolated. The radio frequency power supply is set to 800 W, E mode, throughout the research presented in this study. The analytical results of power dissipation, derived from the experiments, show that 15.4% and 33.3% are dissipated by the nozzle and coil coolant channels, respectively. The experiments also enable the determination of the thermal time constant of the plasma torch for the entire range of RF power.


Nanoscale ◽  
2017 ◽  
Vol 9 (33) ◽  
pp. 11944-11950 ◽  
Author(s):  
Mehrdad Shaygan ◽  
Zhenxing Wang ◽  
Mohamed Saeed Elsayed ◽  
Martin Otto ◽  
Giuseppe Iannaccone ◽  
...  

Metal–insulator–graphene diodes are proved to be able to deliver high performance, and meanwhile are suitable for radiofrequency power detection.


Sign in / Sign up

Export Citation Format

Share Document