Substrate temperature dependence of the properties of Ga-doped ZnO films deposited by DC reactive magnetron sputtering

Vacuum ◽  
2007 ◽  
Vol 82 (1) ◽  
pp. 9-14 ◽  
Author(s):  
Quan-Bao Ma ◽  
Zhi-Zhen Ye ◽  
Hai-Ping He ◽  
Jing-Rui Wang ◽  
Li-Ping Zhu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Temperature Dependence ◽  
Reactive Magnetron Sputtering ◽  
Zno Films ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Doped Zno

Performance improvement of TiO2/CuO by increasing oxygen flow rates and substrate temperature using DC reactive magnetron sputtering method

Optik ◽  
2020 ◽  
Vol 206 ◽  
pp. 164297
Author(s):  
Paulina Sawicka-Chudy ◽  
Grzegorz Wisz ◽  
Maciej Sibiński ◽  
Zbigniew Starowicz ◽  
Łukasz Głowa ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Performance Improvement ◽  
Reactive Magnetron Sputtering ◽  
Oxygen Flow ◽  
Reactive Magnetron ◽  
Flow Rates ◽  
Dc Reactive Magnetron Sputtering
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