Atomic emission stratigraphy by laser-induced plasma spectroscopy: Quantitative depth profiling of metal thin film systems

2014 ◽  
Vol 302 ◽  
pp. 189-193 ◽  
Author(s):  
Tristan O. Nagy ◽  
Ulrich Pacher ◽  
Hannes Pöhl ◽  
Wolfgang Kautek
Keyword(s):  
Thin Film ◽  
Depth Profiling ◽  
Atomic Emission ◽  
Plasma Spectroscopy ◽  
Laser Induced Plasma ◽  
Metal Thin Film

Surface Microstructure Evolution Upon Silicidation of Ni(Pt) and the Different Responses to Metal Etch

2013 ◽  
Author(s):  
Wentao Qin ◽  
Dorai Iyer ◽  
Jim Morgan ◽  
Carroll Casteel ◽  
Robert Watkins ◽  
...  
Keyword(s):  
Thin Film ◽  
Oxide Film ◽  
Microstructure Evolution ◽  
Depth Profiling ◽  
Surface Microstructure ◽  
The Difference ◽  
Surface Microstructures ◽  
Pt Films

Abstract Ni(5 at.%Pt ) films were silicided at a temperature below 400 °C and at 550 °C. The two silicidation temperatures had produced different responses to the subsequent metal etch. Catastrophic removal of the silicide was seen with the low silicidation temperature, while the desired etch selectivity was achieved with the high silicidation temperature. The surface microstructures developed were characterized with TEM and Auger depth profiling. The data correlate with both silicidation temperatures and ultimately the difference in the response to the metal etch. With the high silicidation temperature, there existed a thin Si-oxide film that was close to the surface and embedded with particles which contain metals. This thin film is expected to contribute significantly to the desired etch selectivity. The formation of this layer is interpreted thermodynamically.

scholarly journals Application of laser-induced plasma spectroscopy to detect contaminants in food

2021 ◽  
Author(s):  
Mangasi Alion Marpaung ◽  
Erfan Handoko ◽  
Marincan Pardede
Keyword(s):  
Plasma Spectroscopy ◽  
Laser Induced Plasma

scholarly journals Analysis of Thin Film Specimens Using ToF-SIMS Wedge Protocol, A Comparison with Depth Profiling

2021 ◽  
Vol 27 (S1) ◽  
pp. 1564-1565
Author(s):  
Vincent Smentkowski ◽  
Shubhodeep Goswami ◽  
Felix Kollmer ◽  
Julia Zakel ◽  
Henrik Arlinghaus ◽  
...  
Keyword(s):  
Thin Film ◽  
Depth Profiling ◽  
Tof Sims

A comparison of nanosecond and femtosecond laser-induced plasma spectroscopy of brass samples

2000 ◽  
Vol 55 (11) ◽  
pp. 1771-1785 ◽  
Author(s):  
V Margetic ◽  
A Pakulev ◽  
A Stockhaus ◽  
M Bolshov ◽  
K Niemax ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Plasma Spectroscopy ◽  
Laser Induced Plasma

Design of a low-cost detection system for laser-induced plasma spectroscopy

1999 ◽  
Vol 70 (9) ◽  
pp. 3519-3522 ◽  
Author(s):  
R. E. Neuhauser ◽  
B. Ferstl ◽  
C. Haisch ◽  
U. Panne ◽  
R. Niessner
Keyword(s):  
Detection System ◽  
Low Cost ◽  
Plasma Spectroscopy ◽  
Laser Induced Plasma

Laser-Induced Plasma Spectroscopy of Hydrogen Balmer Series in Laboratory Air

2014 ◽  
Vol 68 (9) ◽  
pp. 1016-1020 ◽  
Author(s):  
Lauren D. Swafford ◽  
Christian G. Parigger
Keyword(s):  
Plasma Spectroscopy ◽  
Balmer Series ◽  
Laser Induced Plasma
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