Preparation and properties of erbium oxide films deposited by radio frequency magnetron sputtering

2014 ◽  
Vol 307 ◽  
pp. 615-620 ◽  
Author(s):  
Yanping Wu ◽  
Shengfa Zhu ◽  
Tianwei Liu ◽  
Fangfang Li ◽  
Yanzhi Zhang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Erbium Oxide

scholarly journals Tungsten oxide films by radio-frequency magnetron sputtering for near-infrared photonics

2021 ◽  
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Author(s):  
Hao Chen ◽  
Alessandro Chiasera ◽  
Stefano Varas ◽  
Osman Sayginer ◽  
Cristina Armellini ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Tungsten Oxide ◽  
Near Infrared ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

scholarly journals Arsenic doped p-type zinc oxide films grown by radio frequency magnetron sputtering

2009 ◽  
Vol 106 (7) ◽  
pp. 073709 ◽  
Author(s):  
J. C. Fan ◽  
C. Y. Zhu ◽  
S. Fung ◽  
Y. C. Zhong ◽  
K. S. Wong ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
P Type
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