Defects generated by MF magnetron sputtering and their influences on the electrical and optical properties of Al doped ZnO thin films

Applied Surface Science ◽

10.1016/j.apsusc.2015.04.051 ◽

2015 ◽

Vol 351 ◽

pp. 392-400 ◽

Author(s):

Changshan Hao ◽

Mandar M. Shirolkar ◽

Jieni Li ◽

Binjun Wu ◽

Shiliu Yin ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

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Study on the structural, electrical and optical properties of Al-F co-doped ZnO thin films prepared by RF magnetron sputtering

Optoelectronics Letters ◽

10.1007/s11801-011-9266-0 ◽

2011 ◽

Vol 7 (1) ◽

pp. 45-48 ◽

Author(s):

Rui-xin Ma ◽

Mu-kong Wang ◽

Bo Kang ◽

Yong-gang Wang

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Doped Zno ◽

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Effects of sputtering power on structural, electrical and optical properties of Cr-doped ZnO thin films prepared by magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-014-2426-9 ◽

2014 ◽

Vol 26 (1) ◽

pp. 493-497 ◽

Author(s):

Chang-Feng Fu ◽

Lian-Fu Han ◽

Chao Liu

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Sputtering Power ◽

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Properties of Al Doped ZnO Thin films by DC Reaction Magnetron Sputtering

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.306-307.362 ◽

2011 ◽

Vol 306-307 ◽

pp. 362-367

Author(s):

Feng Lu ◽

Yu Sun ◽

Cheng Hai Xu

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Visible Region ◽

Hexagonal Wurtzite Structure ◽

Zno Thin Films ◽

High Quality ◽

Electrical And Optical Properties ◽

Polycrystalline Hexagonal Wurtzite Structure ◽

The high quality ZAO thin films were successfully produced by DC reaction magnetron sputtering technology. The XRD，electrical and optical properties of films are particular investigated. The results show that ZAO films are polycrystalline hexagonal wurtzite structure，and Al2O3 crystal phase are not found. At the same time，the high quality ZAO films with the minimum resistivity of 4.5x10-4Ω•㎝, the transmittance in visible region above 80% and the reflectivity in IR region above 70% are gained.

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Electrical and Optical Properties of Ga-doped ZnO Thin Films Deposited at Different Process Pressures by RF Magnetron Sputtering

Applied Science and Convergence Technology ◽

10.5757/jkvs.2012.21.1.17 ◽

2012 ◽

Vol 21 (1) ◽

pp. 17-21 ◽

Author(s):

Seong-Jin Jeong ◽

Deok-Kyu Kim ◽

Hong-Bae Kim

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

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Effect of annealing treatment on structural, electrical, and optical properties of Ga-doped ZnO thin films deposited by RF magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.04.147 ◽

2011 ◽

Vol 520 (2) ◽

pp. 703-707 ◽

Author(s):

F. Wu ◽

L. Fang ◽

Y.J. Pan ◽

K. Zhou ◽

H.B. Ruan ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Annealing Treatment ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

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Effect of deposition time on structural, electrical and optical properties of Aluminium doped ZnO thin films by RF magnetron sputtering

Materials Today Proceedings ◽

10.1016/j.matpr.2018.01.052 ◽

2018 ◽

Vol 5 (1) ◽

pp. 2710-2715 ◽

Author(s):

Rajkumar S. Tondare ◽

B.W. Shivaraj ◽

H.N. Narasimhamurthy ◽

M. Krishna ◽

T.K. Subramanyam

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Deposition Time ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

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Structural, Electrical and Optical Properties of Cd Doped ZnO Thin Films by Reactive dc Magnetron Sputtering

JOM ◽

10.1007/s11837-015-1344-5 ◽

2015 ◽

Vol 67 (4) ◽

pp. 834-839 ◽

Author(s):

A. Guru Sampath Kumar ◽

L. Obulapathi ◽

T. Sofi Sarmash ◽

D. Jhansi Rani ◽

M. Maddaiah ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Electrical And Optical Properties ◽

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Effects of substrate temperature on the structural, morphological, electrical and optical properties of Al and Ga co-doped ZnO thin films grown by DC magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2015.01.130 ◽

2015 ◽

Vol 145 ◽

pp. 279-282 ◽

Author(s):

Ke Zhu ◽

Ye Yang ◽

Weijie Song

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Doped Zno ◽

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Electrical and optical properties of Sb-doped ZnO thin films synthesized by sol–gel method

Chinese Physics B ◽

10.1088/1674-1056/23/4/047805 ◽

2014 ◽

Vol 23 (4) ◽

pp. 047805 ◽

Author(s):

Meng-Meng Cao ◽

Xiao-Ru Zhao ◽

Li-Bing Duan ◽

Jin-Ru Liu ◽

Meng-Meng Guan ◽

...

Keyword(s):

Optical Properties ◽

Sol Gel ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Sol Gel Method ◽

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Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering

Optics Communications ◽

10.1016/j.optcom.2008.10.003 ◽

2009 ◽

Vol 282 (2) ◽

pp. 247-252 ◽

Author(s):

Xue-Yong Li ◽

Hong-Jian Li ◽

Zhi-Jun Wang ◽

Hui Xia ◽

Zhi-Yong Xiong ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Structural And Optical Properties ◽

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