Diamond-like carbon (DLC) films is useful in many applications. To improve the tribological properties in DLC, we spin coat the multi-walled carbon nanotubes (CNTs) with different solution on (100) silicon. DLC was deposited by plasma enhanced chemical vapor deposition (PECVD) with C2H2and H2. The results show that the ID/IGratio is increasing with higher CNTs content while the friction coefficient and critical load are decreasing with larger CNTs contents. The decreasing friction coefficient results from graphitation on the surface due to higher sp2content. The decreasing critical load is attributed to higher internal stress. The effect of friction coefficient and CNT concentration on stress distribution is studied by a nanoscratch finite element analysis. The results indicate that low friction coefficient and high CNT concentration will reduce the stress magnitude in the film. Therefore, the decreasing friction coefficient in CNT doped DLC film with increasing CNT concentration should reduce stress in the film and is good for adhesion. The discrepancy between friction coefficient and critical load is explained in terms of high internal stress during deposition. A surface treatment on CNT before deposition to reduce internal stress is currently under investigation.
Tribological Properties of Hard Carbon Films on Zirconia Ceramics
