High-efficiency synthesis of large-area monolayer WS2 crystals on SiO2/Si substrate via NaCl-assisted atmospheric pressure chemical vapor deposition

2020 ◽  
Vol 533 ◽  
pp. 147479
Author(s):  
Biao Shi ◽  
Daming Zhou ◽  
Risheng Qiu ◽  
Mohamed Bahri ◽  
Xiangdong Kong ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
High Efficiency ◽  
Chemical Vapor ◽  
Si Substrate ◽  
Large Area ◽  
Pressure Chemical

Synthesis of large-area uniform MoS 2 films by substrate-moving atmospheric pressure chemical vapor deposition: from monolayer to multilayer

2D Materials ◽  
2019 ◽  
Vol 6 (2) ◽  
pp. 025030 ◽  
Author(s):  
Tianying He ◽  
Yongjun Li ◽  
Zhifei Zhou ◽  
Cheng Zeng ◽  
Liang Qiao ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Chemical Vapor ◽  
Large Area ◽  
Pressure Chemical

scholarly journals Large-area synthesis of monolayer MoSe2 films on SiO2/Si substrates by atmospheric pressure chemical vapor deposition

RSC Advances ◽  
2017 ◽  
Vol 7 (45) ◽  
pp. 27969-27973 ◽  
Author(s):  
Yu Zhao ◽  
Hyunjea Lee ◽  
Woong Choi ◽  
Weidong Fei ◽  
Cheol Jin Lee
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Chemical Vapor ◽  
Large Area ◽  
Si Substrates ◽  
Pressure Chemical

We report the synthesis of large-area monolayer MoSe2 films extended up to a millimeter scale on SiO2/Si substrates by atmospheric pressure chemical vapor deposition (CVD).

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