Radical flux control in reactive ion beam etching (RIBE) by dual exhaust system
1994 ◽
Vol 12
(6)
◽
pp. 3374
◽
1989 ◽
Vol 28
(Part 2, No. 9)
◽
pp. L1671-L1672
1985 ◽
Vol 3
(1)
◽
pp. 402
◽
1999 ◽
Vol 12
(2-3)
◽
pp. 229-233
◽
1983 ◽
Vol 22
(Part 2, No. 4)
◽
pp. L219-L220
◽
2012 ◽
Vol 6
(3)
◽
pp. 487-489
◽