Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD

2008 ◽  
Vol 8 (1) ◽  
pp. 6-12 ◽  
Author(s):  
R.M. Dey ◽  
S.B. Singh ◽  
A. Biswas ◽  
R.B. Tokas ◽  
N. Chand ◽  
...  
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Substrate Bias ◽  
Plasma Cvd ◽  
Ecr Plasma ◽  
Diamond Like Carbon Film

Hybrid plasma system for diamond-like carbon film deposition

2000 ◽  
Vol 131 (1-3) ◽  
pp. 20-25 ◽  
Author(s):  
D Korzec ◽  
G Fedosenko ◽  
A Georg ◽  
J Engemann
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Plasma System ◽  
Diamond Like Carbon Film ◽  
Hybrid Plasma

scholarly journals X-ray reflectivity study of bias graded diamond like carbon film synthesized by ECR plasma

2013 ◽  
Vol 36 (1) ◽  
pp. 9-14 ◽  
Author(s):  
R M DEY ◽  
S K DESHPANDE ◽  
S B SINGH ◽  
N CHAND ◽  
D S PATIL ◽  
...  
Keyword(s):  
Carbon Film ◽  
Diamond Like Carbon ◽  
X Ray ◽  
Ecr Plasma ◽  
Diamond Like Carbon Film
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