Hybrid plasma system for diamond-like carbon film deposition
2000 ◽
Vol 131
(1-3)
◽
pp. 20-25
◽
Keyword(s):
2003 ◽
Vol 206
◽
pp. 893-897
◽
Keyword(s):
1993 ◽
Vol 32
(Part 2, No. 6A)
◽
pp. L802-L805
◽
1996 ◽
Vol 96-98
◽
pp. 859-865
◽
Keyword(s):
Keyword(s):
2002 ◽
Vol 11
(8)
◽
pp. 1491-1495
◽
Keyword(s):
2001 ◽
Vol 142-144
◽
pp. 693-697
◽
Keyword(s):