Optimization of flux ratio of C60 molecule to Ar cluster ion for diamond-like carbon film deposition by NEXAFS measurement

2003 ◽  
Vol 206 ◽  
pp. 893-897 ◽  
Author(s):  
K. Miyauchi ◽  
T. Kitagawa ◽  
N. Toyoda ◽  
S. Matsui ◽  
K. Mochiji ◽  
...  
Keyword(s):  
Carbon Film ◽  
Flux Ratio ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Diamond Like Carbon Film ◽  
Cluster Ion

Hybrid plasma system for diamond-like carbon film deposition

2000 ◽  
Vol 131 (1-3) ◽  
pp. 20-25 ◽  
Author(s):  
D Korzec ◽  
G Fedosenko ◽  
A Georg ◽  
J Engemann
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Plasma System ◽  
Diamond Like Carbon Film ◽  
Hybrid Plasma

Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD

2008 ◽  
Vol 8 (1) ◽  
pp. 6-12 ◽  
Author(s):  
R.M. Dey ◽  
S.B. Singh ◽  
A. Biswas ◽  
R.B. Tokas ◽  
N. Chand ◽  
...  
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Substrate Bias ◽  
Plasma Cvd ◽  
Ecr Plasma ◽  
Diamond Like Carbon Film

scholarly journals Influences of Film Deposition Condition on Friction of Diamond-Like Carbon Film: A Theoretical Investigation

2010 ◽  
Vol 5 (3) ◽  
pp. 173-180 ◽  
Author(s):  
Tasuku Onodera ◽  
Takanori Kuriaki ◽  
Shandan Bai ◽  
Ryo Nagumo ◽  
Ryuji Miura ◽  
...  
Keyword(s):  
Theoretical Investigation ◽  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Deposition Condition ◽  
Diamond Like Carbon Film
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