Diagnosis of dielectric barrier discharge CH4 plasmas for diamond-like carbon film deposition

2002 ◽  
Vol 11 (8) ◽  
pp. 1491-1495 ◽  
Author(s):  
Dongping Liu ◽  
Yong Xu ◽  
Xuefeng Yang ◽  
Shiji Yu ◽  
Qi Sun ◽  
...  
Keyword(s):  
Dielectric Barrier Discharge ◽  
Barrier Discharge ◽  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Dielectric Barrier ◽  
Diamond Like Carbon Film

Dielectric-barrier discharge plasma source and its application to synthesis of diamond like carbon films

2008 ◽  
Vol 1083 ◽  
Author(s):  
Xinpeng Wang ◽  
Xiaoliang Tang ◽  
Peter Xianping Feng
Keyword(s):  
Thin Films ◽  
Dielectric Barrier Discharge ◽  
Discharge Plasma ◽  
Barrier Discharge ◽  
Carbon Film ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Dielectric Barrier Discharge Plasma ◽  
Dielectric Barrier ◽  
Barrier Discharge Plasma

ABSTRACTDielectric barrier discharge plasma sources have been studied and used for syntheses of diamond like carbon thin films. The plasma electrical properties under different gases concentrations and pressures were diagnosed. Based on the results of characterizations, dielectric barrier discharge plasma at different methane-hydrogen-argon gas ratios was used to synthesize large area of diamond like carbon films. Experimental data indicate that only at argon concentration equal to or less than 75% diamond like carbon film fabrication could be accomplished, which has been confirmed based on the Raman spectra and their hardness measurements, whereas high argon content during deposition would result in graphite type of thin films.

Hybrid plasma system for diamond-like carbon film deposition

2000 ◽  
Vol 131 (1-3) ◽  
pp. 20-25 ◽  
Author(s):  
D Korzec ◽  
G Fedosenko ◽  
A Georg ◽  
J Engemann
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Plasma System ◽  
Diamond Like Carbon Film ◽  
Hybrid Plasma
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