Evolution of Vacuum Ultraviolet Emission in Dual-Frequency Capacitively Coupled Plasmas
Keyword(s):
2015 ◽
Vol 33
(2)
◽
pp. 021310
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Keyword(s):
2011 ◽
Vol 50
(3R)
◽
pp. 036001
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Keyword(s):
2015 ◽
Vol 33
(3)
◽
pp. 031302
◽
2010 ◽
Vol 157
(1)
◽
pp. D21
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2017 ◽
Vol 26
(8)
◽
pp. 085006
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2011 ◽
Vol 50
◽
pp. 036001
◽
Keyword(s):
2004 ◽
Vol 43
(8A)
◽
pp. 5533-5539
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2013 ◽
Vol 31
(6)
◽
pp. 061311
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