Ultrasonic-vibration-assisted laser annealing of fluorine-doped tin oxide thin films for improving optical and electrical properties: Overlapping rate optimization

2018 ◽  
Vol 44 (18) ◽  
pp. 22225-22234 ◽  
Author(s):  
Bao-Jia Li ◽  
Yong-Ying Wang ◽  
Li-Jing Huang ◽  
Hai-Di Cao ◽  
Qinghua Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Ultrasonic Vibration ◽  
Tin Oxide ◽  
Laser Annealing ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Rate Optimization

Annealing effect on structural, optical and electrical properties of pure and Mg doped tin oxide thin films

2013 ◽  
Vol 24 (12) ◽  
pp. 4925-4931
Author(s):  
Syed Mansoor Ali ◽  
Jan Muhammad ◽  
Syed Tajammul Hussain ◽  
Syed Danish Ali ◽  
Naeem Ur Rehman ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Tin Oxide ◽  
Annealing Effect ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Mg Doped

Study on Fabrication and Properties of Copper-Tin-Oxide Thin Films

2009 ◽  
Vol 79-82 ◽  
pp. 787-790
Author(s):  
Ti Ning ◽  
Feng Ji ◽  
Jin Ma ◽  
Zhen Guo Song ◽  
Xu An Pei ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Perovskite Structure ◽  
Annealing Temperature ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Thermal Probe ◽  
P Type

Copper-tin-oxide thin films have been prepared on quartz substrates by the magnetron sputtering method. The structural,optical and electrical properties were investigated. The prepared samples were amorphous, CuSnO3 single crystalline grains with perovskite structure were observed after annealing temperature was above 530°C. The optical and electrical properties had great dependence with reactive gas pressure and annealing temperature. Thermal probe reveals p type conductivity of some samples. Keywords: Magnetron sputtering, CuSnO3, Perovskite structure

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