Ion beam forming of a shell type natural single crystal diamond stylus and sharpening of it by swinging a conical type diamond stylus

AbstractIn order to apply ion beam etching with hydrogen ions to the ultra-precision processing of diamond tools, hydrogen ion beam etching characteristics of single crystal diamond chips with (100) face were investigated. The etching rate of diamond for 500 eV and 1000 eV hydrogen ions increases with the increase of the ion incidence angle, and eventually reaches a maximum at the ion incidence angle of approximately 50°, then may decrease with the increase of the ion incidence angle. The dependence of the etching rate on the ion incidence angle of hydrogen ions is fairly similar to that obtained with argon ions. Furthermore, the surface roughness of diamond chips before and after hydrogen ion beam etching was evaluated using an atomic force microscope. Consequently, the surface roughness after hydrogen ion beam etching decreases with the increase of the ion incidence angle within range of the ion incidence angle of 60°.

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Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling

Advances in Photonics of Quantum Computing, Memory, and Communication XI ◽

10.1117/12.2290177 ◽

2018 ◽

Cited By ~ 1

Author(s):

Teodoro Graziosi ◽

Sichen Mi ◽

Niels Quack ◽

Marcell Kiss

Keyword(s):

Single Crystal ◽

Focused Ion Beam ◽

Ion Beam ◽

Reactive Ion Etching ◽

Ion Etching ◽

Disk Resonators ◽

Single Crystal Diamond ◽

Focused Ion Beam Milling

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Surface morphology analysis of natural single crystal diamond chips bombarded with Ar+ ion beam

Vacuum ◽

10.1016/j.vacuum.2010.01.045 ◽

2010 ◽

Vol 84 (12) ◽

pp. 1423-1426 ◽

Cited By ~ 1

Author(s):

Takashi Nagase ◽

Hiroyuki Kato ◽

Shahjada A. Pahlovy ◽

Iwao Miyamoto

Keyword(s):

Surface Morphology ◽

Single Crystal ◽

Ion Beam ◽

Morphology Analysis ◽

Single Crystal Diamond

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Removal and characterization of focused-ion-beam-induced damaged layer on single crystal diamond surface and application to multiple depth patterning

Diamond and Related Materials ◽

10.1016/j.diamond.2016.10.018 ◽

2016 ◽

Vol 70 ◽

pp. 159-166 ◽

Cited By ~ 8

Author(s):

Noritaka Kawasegi ◽

Seiya Kuroda ◽

Noboru Morita ◽

Kazuhito Nishimura ◽

Makoto Yamaguchi ◽

...

Keyword(s):

Single Crystal ◽

Focused Ion Beam ◽

Ion Beam ◽

Diamond Surface ◽

Single Crystal Diamond

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Oxygen Ion Beam Etching of Single Crystal Diamond Chips Using an ECR-type Ion Source.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.62.1459 ◽

1996 ◽

Vol 62 (10) ◽

pp. 1459-1463 ◽

Cited By ~ 3

Author(s):

Shuji KIYOHARA ◽

Iwao MIYAMOTO

Keyword(s):

Single Crystal ◽

Ion Beam ◽

Ion Source ◽

Ion Beam Etching ◽

Oxygen Ion ◽

Single Crystal Diamond

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Single-crystal diamond tools formed using a focused ion beam: Tool life enhancement via heat treatment

Diamond and Related Materials ◽

10.1016/j.diamond.2014.07.013 ◽

2014 ◽

Vol 49 ◽

pp. 14-18 ◽

Cited By ~ 16

Author(s):

Noritaka Kawasegi ◽

Kazuma Ozaki ◽

Noboru Morita ◽

Kazuhito Nishimura ◽

Hideki Sasaoka

Keyword(s):

Heat Treatment ◽

Single Crystal ◽

Tool Life ◽

Focused Ion Beam ◽

Ion Beam ◽

Diamond Tools ◽

Single Crystal Diamond ◽

Life Enhancement

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Nanopatterning on Nano-Polycrystalline Diamond and Cubic Boron Nitride Using Focused Ion Beam and Heat Treatment to Fabricate Textured Cutting Tools

Materials Science Forum ◽

10.4028/www.scientific.net/msf.874.543 ◽

2016 ◽

Vol 874 ◽

pp. 543-548 ◽

Cited By ~ 1

Author(s):

Noritaka Kawasegi ◽

Kazuma Ozaki ◽

Noboru Morita ◽

Kazuhito Nishimura ◽

Makoto Yamaguchi ◽

...

Keyword(s):

Heat Treatment ◽

Boron Nitride ◽

Single Crystal ◽

Focused Ion Beam ◽

High Efficiency ◽

Ion Beam ◽

Cubic Boron Nitride ◽

Cutting Tools ◽

Polycrystalline Diamond ◽

Single Crystal Diamond

Texturing on the surface of cutting tools is an effective method to improve the friction and resultant machining performances of the tool. In this study, to fabricate nanotextures on various tools used for precision cutting, a patterning method on nanopolycrystalline diamond and cubic boron nitride tools was investigated using focused ion beam (FIB) irradiation and heat treatment. Patterning was possible using this method, and the patterning characteristics were different from those of single-crystal diamond. This method was more suitable for cutting tools compared with direct FIB machining because of its high efficiency and significantly low affected layer.

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