ABSTRACTA tremendous variation in electrical resistance, from the semiconductor to metallic range, has been observed in titania nanotube arrays at room temperature, ≈25°C, in the presence of low ppm hydrogen gas concentrations (≤ 1000 ppm). The nanotube arrays are fabricated by anodizing titanium foil in an aqueous fluoride containing electrolyte solution. Subsequently, the arrays are annealed in an oxygen ambient, then coated with a 10 nm layer of palladium by evaporation. Electrical contacts are made by sputtering a small (e.g. 1 mm diameter) platinum disk atop the Pd coated nanotube-array. These sensors exhibit a resistance variation of the order of over 107 (1,000,000,000%) in the presence of 1000 ppm hydrogen at 23°C. To the best of our knowledge this dynamic change in electrical resistance the largest known response of any material, to any gas, at any temperature. The sensors demonstrate complete reversibility, repeatability, high selectivity, no drift and wide dynamic range. The nanoscale geometry of the nanotubes, in particular the points of tube-to-tube contact, is believed to be responsible for the outstanding hydrogen gas sensitivities.
