A thickness measurement technique based on low-coherence interferometry applied to a liquid film with thermal gradient

2010 ◽  
Vol 34 (8) ◽  
pp. 1242-1246 ◽  
Author(s):  
Nicolas Borgetto ◽  
Cédric Galizzi ◽  
Frédéric André ◽  
Dany Escudié
Keyword(s):  
Liquid Film ◽  
Measurement Technique ◽  
Thermal Gradient ◽  
Thickness Measurement ◽  
Low Coherence ◽  
Low Coherence Interferometry

Measurement technique for surface profiling in low-coherence interferometry

2005 ◽  
Vol 254 (1-3) ◽  
pp. 52-57 ◽  
Author(s):  
Ribun Onodera ◽  
Hiroki Wakaumi ◽  
Yukihiro Ishii
Keyword(s):  
Measurement Technique ◽  
Surface Profiling ◽  
Low Coherence ◽  
Low Coherence Interferometry

Silicon Fringe Sample Metrology—A Thickness Measurement Technique

2013 ◽  
Author(s):  
Mark Kimball
Keyword(s):  
Temperature Dependence ◽  
Temperature Coefficient ◽  
Measurement Technique ◽  
Thickness Measurement ◽  
Sample Thickness ◽  
Index Of Refraction ◽  
Interference Fringes ◽  
Noncontact Method ◽  
Thickness Variations

Abstract Silicon’s index of refraction has a strong temperature coefficient. This temperature dependence can be used to aid sample thinning procedures used for backside analysis, by providing a noncontact method of measuring absolute sample thickness. It also can remove slope ambiguity while counting interference fringes (used to determine the direction and magnitude of thickness variations across a sample).

scholarly journals Interferometric Instrument for Thickness Measurement on Blown Films

Photonics ◽  
2021 ◽  
Vol 8 (7) ◽  
pp. 245
Author(s):  
Michele Norgia ◽  
Alessandro Pesatori
Keyword(s):  
Film Thickness ◽  
Temperature Compensation ◽  
Close Contact ◽  
Thickness Measurement ◽  
The Novel ◽  
Blown Films ◽  
Low Coherence ◽  
Real Time Measurement ◽  
Blown Film ◽  
Standard Techniques

Real-time measurement of plastic film thickness during production is extremely important to guarantee planarity of the final film. Standard techniques are based on capacitive measurements, in close contact with the film. These techniques require continuous calibration and temperature compensation, while their contact can damage the film. Different optical contactless techniques are described in literature, but none has found application to real production, due to the strong vibration of the films. We propose a new structure of low-coherence fiber interferometer able to measure blown film thickness during productions. The novel fiber-optic setup is a cross between an autocorrelator and a white light interferometer, taking the advantages of both approaches.

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