Al based alloys, such as Ti/Al, are commonly used for ohmic contacts on p-type SiC.
The interfacial structures of a metal alloy film on SiC are very complicated after annealing. Al is
considered as the key element responsible for forming ohmic contacts on p-type SiC, and reacts
with C from SiC and forms Al4C3 and Si during annealing. In this study, we have investigated
ohmic contact formation of a single component Al4C3 film on p-type SiC. Based on the
stoichiometric formation of Al4C3 between Al and C at high temperatures, several samples with
various Al/C mole ratios have been examined for ohmic contact formation after different annealing
temperatures. Carbon rich and stoichiometric Al4C3 films form ohmic contacts on p-type 4H-SiC
(~2.8 x1018 cm-3 ) after annealing at 800 and 900°C. X-ray diffraction (XRD) data have shown that a
single component Al4C3 is formed when an ohmic contact on p-type SiC is activated. Al/SiC, as the
control sample, does not form ohmic contacts under the same conditions. This study reveals that
Al4C3 can be responsible for forming ohmic contacts on p-type SiC. However, its chemical
instability requires that the secondary metal is necessary to form stable ohmic contacts when Albased
films are used.