Effect of substrate temperature on sputtered indium-aluminum-zinc oxide films and thin film transistors

2019 ◽  
Vol 791 ◽  
pp. 773-778 ◽  
Author(s):  
Weidong Xu ◽  
Jianfeng Jiang ◽  
Sanjin Xu ◽  
Yu Zhang ◽  
Huayong Xu ◽  
...  
Materials ◽  
2017 ◽  
Vol 10 (8) ◽  
pp. 880 ◽  
Author(s):  
Xue Zhang ◽  
Hyeonju Lee ◽  
Jung-Hyok Kwon ◽  
Eui-Jik Kim ◽  
Jaehoon Park

2016 ◽  
Vol 17 (1) ◽  
pp. 1-7 ◽  
Author(s):  
Sang Cheol Park ◽  
Dongwook Kim ◽  
Hyunji Shin ◽  
Do Kyoung Lee ◽  
Xue Zhang ◽  
...  

2014 ◽  
Vol 602-603 ◽  
pp. 871-875
Author(s):  
Yen Pei Fu ◽  
Jian Jhih Chen

In this study, ZnO films, prepared by Chemical Bath Deposition (CBD), are applied as the conductive layers for thin film solar cells. Zinc acetate is used as a source of zinc, and different proportions of ammonia solution are added and well mixed. The growth of zinc oxide films in reaction solutions is taken place at 80°C and then heated to 500°C for one hour. In this study, the different ammonia concentrations and deposition times is controlled. The thin film structure is Hexagonal structure, which is determined by X-ray diffraction spectrometer (XRD) analysis. Scanning electron microscopy (SEM) is used as the observation of surface morphology, the bottom of the film is the interface where the heterogeneous nucleation happens. With the increase of deposition time, there were a few attached zinc oxide particles, which is formed by homogeneous nucleation. According to UV / visible light (UV / Vis) absorption spectrometer transmittance measurements and the relationship between/among the incident wavelength, it can be converted to the energy gaps (Eg), which are about 3.0 to 3.2eV, by using fluorescence spectroscopy analysis. The emission of zinc oxide films has two wavelengths which are located on 510nm and 570nm. According to Based on the all analytic results, the ammonia concentration at 0.05M, and the deposition time is 120 minutes, would obtain the conditions of ZnO films which is more suitable for applications of conductive layer material in thin film solar cell.


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