Effect of discharge power and silicon content on optical and mechanical properties of carbon-rich amorphous silicon carbide films obtained by PECVD

Optical And Mechanical Properties

Silicon content influence on structure and photoluminescence properties of carbon rich hydrogenated amorphous silicon carbide thin films

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2018.04.226 ◽

2018 ◽

Vol 753 ◽

pp. 320-328 ◽

Cited By ~ 12

Author(s):

Mingming Li ◽

Lihua Jiang ◽

Yihua Sun ◽

Ting Xiao ◽

Peng Xiang ◽

...

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Silicon Content ◽

Hydrogenated Amorphous Silicon ◽

Photoluminescence Properties ◽

Hydrogenated Amorphous

Role of Amorphous Silicon Carbide in Microstructure and Mechanical Properties of nc-TiC/a-SiC Nanocomposite Coatings Prepared by PECVD

Key Engineering Materials - High-Performance Ceramics IV ◽

10.4028/0-87849-410-3.2271 ◽

2007 ◽

pp. 2271-2274

Author(s):

Jung Tae Ok ◽

Chung Yun Kang ◽

Seong Soo Park ◽

Pung Keun Song ◽

Kwang Ho Kim

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Nanocomposite Coatings ◽

Microstructure And Mechanical Properties

Composition and Mechanical Properties of rf-Sputtered Amorphous Silicon Carbide Coating

Journal of the American Ceramic Society ◽

10.1111/j.1151-2916.1992.tb05627.x ◽

1992 ◽

Vol 75 (9) ◽

pp. 2623-2626 ◽

Cited By ~ 4

Author(s):

Jung-Sheng Huang ◽

Matthew Ohland ◽

Wendell S. Williams

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Carbide Coating ◽

Role of Amorphous Silicon Carbide in Microstructure and Mechanical Properties of nc-TiC/a-SiC Nanocomposite Coatings Prepared by PECVD

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.336-338.2271 ◽

2007 ◽

Vol 336-338 ◽

pp. 2271-2274

Author(s):

Jung Tae Ok ◽

Chung Yun Kang ◽

Seong Soo Park ◽

Pung Keun Song ◽

Kwang Ho Kim

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Nanocomposite Coatings ◽

Microstructure And Mechanical Properties

Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2009.10.154 ◽

2010 ◽

Vol 518 (10) ◽

pp. 2738-2744 ◽

Cited By ~ 11

Author(s):

Y. Awad ◽

M.A. El Khakani ◽

D. Brassard ◽

R. Smirani ◽

N. Camiré ◽

...

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Thermal Annealing ◽

Vapor Deposition ◽

Chemical Vapor ◽

Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings

Advanced Functional Materials ◽

10.1002/adfm.201400693 ◽

2014 ◽

Vol 24 (36) ◽

pp. 5737-5744 ◽

Cited By ~ 40

Author(s):

René H. Poelma ◽

Bruno Morana ◽

Sten Vollebregt ◽

Erik Schlangen ◽

Henk W. van Zeijl ◽

...

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Carbon Nanotube ◽

Aspect Ratio ◽

Amorphous Silicon ◽

High Aspect Ratio ◽

Nanotube Arrays ◽

Carbon Nanotube Arrays ◽

Carbide Coatings

Mechanical Properties of Amorphous Silicon Carbide

Silicon Carbide - Materials, Processing and Applications in Electronic Devices ◽

10.5772/21689 ◽

2011 ◽

Cited By ~ 3

Author(s):

Kun Xue ◽

Li-Sha Niu ◽

Hui-Ji Shi

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Mechanical properties of hydrogenated amorphous silicon carbide thin films

2010 IEEE International Interconnect Technology Conference ◽

10.1109/iitc.2010.5510305 ◽

2010 ◽

Cited By ~ 1

Author(s):

Yusuke Matsuda ◽

Sean W. King ◽

Jeff Bielefeld ◽

Reinhold H. Dauskardt

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Hydrogenated Amorphous

Structural relaxation of amorphous silicon carbide thin films in thermal annealing

Thin Solid Films ◽

10.1016/j.tsf.2007.06.194 ◽

2008 ◽

Vol 516 (12) ◽

pp. 3855-3861 ◽

Cited By ~ 12

Author(s):

Kun Xue ◽

Li-Sha Niu ◽

Hui-Ji Shi ◽

Jiwen Liu

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Thermal Annealing ◽

Structural Relaxation ◽

Characterization of hydrogenated amorphous silicon carbide films

10.1117/12.57018 ◽

1992 ◽

Author(s):

S. Uthanna

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Hydrogenated Amorphous