Composition and Mechanical Properties of rf-Sputtered Amorphous Silicon Carbide Coating

Journal of the American Ceramic Society ◽

10.1111/j.1151-2916.1992.tb05627.x ◽

1992 ◽

Vol 75 (9) ◽

pp. 2623-2626 ◽

Author(s):

Jung-Sheng Huang ◽

Matthew Ohland ◽

Wendell S. Williams

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Carbide Coating ◽

Amorphous Silicon Carbide

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Role of Amorphous Silicon Carbide in Microstructure and Mechanical Properties of nc-TiC/a-SiC Nanocomposite Coatings Prepared by PECVD

Key Engineering Materials - High-Performance Ceramics IV ◽

10.4028/0-87849-410-3.2271 ◽

2007 ◽

pp. 2271-2274

Author(s):

Jung Tae Ok ◽

Chung Yun Kang ◽

Seong Soo Park ◽

Pung Keun Song ◽

Kwang Ho Kim

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Nanocomposite Coatings ◽

Amorphous Silicon Carbide ◽

Microstructure And Mechanical Properties

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Role of Amorphous Silicon Carbide in Microstructure and Mechanical Properties of nc-TiC/a-SiC Nanocomposite Coatings Prepared by PECVD

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.336-338.2271 ◽

2007 ◽

Vol 336-338 ◽

pp. 2271-2274

Author(s):

Jung Tae Ok ◽

Chung Yun Kang ◽

Seong Soo Park ◽

Pung Keun Song ◽

Kwang Ho Kim

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Nanocomposite Coatings ◽

Amorphous Silicon Carbide ◽

Microstructure And Mechanical Properties

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Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2009.10.154 ◽

2010 ◽

Vol 518 (10) ◽

pp. 2738-2744 ◽

Author(s):

Y. Awad ◽

M.A. El Khakani ◽

D. Brassard ◽

R. Smirani ◽

N. Camiré ◽

...

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Thermal Annealing ◽

Vapor Deposition ◽

Chemical Vapor ◽

Amorphous Silicon Carbide

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Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings

Advanced Functional Materials ◽

10.1002/adfm.201400693 ◽

2014 ◽

Vol 24 (36) ◽

pp. 5737-5744 ◽

Author(s):

René H. Poelma ◽

Bruno Morana ◽

Sten Vollebregt ◽

Erik Schlangen ◽

Henk W. van Zeijl ◽

...

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Carbon Nanotube ◽

Aspect Ratio ◽

Amorphous Silicon ◽

High Aspect Ratio ◽

Nanotube Arrays ◽

Amorphous Silicon Carbide ◽

Carbon Nanotube Arrays ◽

Carbide Coatings

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Mechanical Properties of Amorphous Silicon Carbide

Silicon Carbide - Materials, Processing and Applications in Electronic Devices ◽

10.5772/21689 ◽

2011 ◽

Author(s):

Kun Xue ◽

Li-Sha Niu ◽

Hui-Ji Shi

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Amorphous Silicon Carbide

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Mechanical properties of hydrogenated amorphous silicon carbide thin films

2010 IEEE International Interconnect Technology Conference ◽

10.1109/iitc.2010.5510305 ◽

2010 ◽

Author(s):

Yusuke Matsuda ◽

Sean W. King ◽

Jeff Bielefeld ◽

Reinhold H. Dauskardt

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Effect of discharge power and silicon content on optical and mechanical properties of carbon-rich amorphous silicon carbide films obtained by PECVD

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2019.06.093 ◽

2019 ◽

Vol 801 ◽

pp. 285-294 ◽

Author(s):

Anatolii N. Lukianov ◽

Nickolai I. Klyui ◽

Bo Sha ◽

Volodymyr B. Lozinskii ◽

Volodymyr P. Temchenko ◽

...

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Amorphous Silicon ◽

Silicon Content ◽

Discharge Power ◽

Amorphous Silicon Carbide ◽

Optical And Mechanical Properties

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Structural relaxation of amorphous silicon carbide thin films in thermal annealing

Thin Solid Films ◽

10.1016/j.tsf.2007.06.194 ◽

2008 ◽

Vol 516 (12) ◽

pp. 3855-3861 ◽

Author(s):

Kun Xue ◽

Li-Sha Niu ◽

Hui-Ji Shi ◽

Jiwen Liu

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Thermal Annealing ◽

Structural Relaxation ◽

Amorphous Silicon Carbide

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Characterization of hydrogenated amorphous silicon carbide films

10.1117/12.57018 ◽

1992 ◽

Author(s):

S. Uthanna

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Photoelectron yield spectroscopy and inverse photoemission spectroscopy evaluations of p-type amorphous silicon carbide films prepared using liquid materials

AIP Advances ◽

10.1063/1.4952592 ◽

2016 ◽

Vol 6 (5) ◽

pp. 055021 ◽

Author(s):

Tatsuya Murakami ◽

Takashi Masuda ◽

Satoshi Inoue ◽

Hiroshi Yano ◽

Noriyuki Iwamuro ◽

...

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Photoemission Spectroscopy ◽

Amorphous Silicon Carbide ◽

Inverse Photoemission ◽

P Type ◽

Inverse Photoemission Spectroscopy

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