Role of Amorphous Silicon Carbide in Microstructure and Mechanical Properties of nc-TiC/a-SiC Nanocomposite Coatings Prepared by PECVD

2007 ◽  
pp. 2271-2274
Author(s):  
Jung Tae Ok ◽  
Chung Yun Kang ◽  
Seong Soo Park ◽  
Pung Keun Song ◽  
Kwang Ho Kim
Keyword(s):  
Mechanical Properties ◽  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Nanocomposite Coatings ◽  
Amorphous Silicon Carbide ◽  
Microstructure And Mechanical Properties

Structure of Unhydrogenated Amorphous Silicon Carbide

1988 ◽  
Vol 141 ◽  
Author(s):  
P. C. Kelires ◽  
I. Tersoff
Keyword(s):  
Silicon Carbide ◽  
Phase Separation ◽  
Amorphous Silicon ◽  
Experimental Studies ◽  
Amorphous Silicon Carbide ◽  
Chemical Ordering ◽  
Partial Chemical

AbstractSimulations of unhydrogenated amorphous silicon carbide, formed by condensing a vapor of silicon and carbon atoms, indicate partial chemical ordering, with heteronuclear bonds predominating. We find no evidence of phase separation. Carbon atoms are predominantly three-fold coordinated while silicon atoms have four-fold coordination. By combining these results with results of experimental studies, we speculate on the role of hydrogenation in determining the structure of amorphous silicon carbide.

Structural relaxation of amorphous silicon carbide thin films in thermal annealing

2008 ◽  
Vol 516 (12) ◽  
pp. 3855-3861 ◽  
Author(s):  
Kun Xue ◽  
Li-Sha Niu ◽  
Hui-Ji Shi ◽  
Jiwen Liu
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Thermal Annealing ◽  
Structural Relaxation ◽  
Amorphous Silicon Carbide
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