Structural relaxation of amorphous silicon carbide thin films in thermal annealing
Keyword(s):
2018 ◽
Vol 753
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pp. 320-328
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2013 ◽
Vol 270
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pp. 287-291
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Keyword(s):
2014 ◽
Vol 40
(7)
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pp. 9791-9797
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2001 ◽
Vol 10
(3-7)
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pp. 1268-1272
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Keyword(s):
2013 ◽
Vol 217
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pp. 88-93
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