Flexible heterogeneous integration of PZT film by controlled spalling technology

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2019.151696 ◽

2019 ◽

Vol 807 ◽

pp. 151696 ◽

Cited By ~ 3

Author(s):

Jian He ◽

Jing Zhang ◽

Shuo Qian ◽

Xi Chen ◽

Jichao Qian ◽

...

Keyword(s):

Heterogeneous Integration ◽

Pzt Film

Get full-text (via PubEx)

Heterogeneous Integration of Boost Power Supply and On-Chip Solar Cell using triple well CMOS Process

IEEJ Transactions on Electronics Information and Systems ◽

10.1541/ieejeiss.138.41 ◽

2018 ◽

Vol 138 (1) ◽

pp. 41-49

Author(s):

Kazuma Igarashi ◽

Yoshimasa Minami ◽

Nobuhiko Nakano

Keyword(s):

Solar Cell ◽

Power Supply ◽

Heterogeneous Integration ◽

Cmos Process ◽

On Chip

Get full-text (via PubEx)

Orientation Control and Properties of PZT Film Crystalized using Laser Annealing System

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.136.493 ◽

2016 ◽

Vol 136 (12) ◽

pp. 493-498 ◽

Cited By ~ 1

Author(s):

Junko Kazusa ◽

Kazuhiro Koga ◽

Norio Umeyama ◽

Fumito Imura ◽

Daiji Noda ◽

...

Keyword(s):

Laser Annealing ◽

Orientation Control ◽

Pzt Film

Get full-text (via PubEx)

New Techniques for Heterogeneous Integration for Optical Sensing Systems

10.21236/ada425888 ◽

2003 ◽

Author(s):

Richard M. Osgood ◽

Keyword(s):

Optical Sensing ◽

Heterogeneous Integration ◽

New Techniques ◽

Sensing Systems

Get full-text (via PubEx)

Coupling schemes for heterogeneous integration of III-V membrane devices and silicon-on-insulator waveguides

Journal of Lightwave Technology ◽

10.1109/jlt.2005.856231 ◽

2005 ◽

Vol 23 (11) ◽

pp. 3827-3831 ◽

Cited By ~ 15

Author(s):

G. Roelkens ◽

D. Van Thourhout ◽

R. Baets

Keyword(s):

Silicon On Insulator ◽

Heterogeneous Integration

Get full-text (via PubEx)

Technology Trends in 2.5D/3D Packaging and Heterogeneous Integration

2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) ◽

10.1109/edtm50988.2021.9421033 ◽

2021 ◽

Author(s):

Masaya Kawano

Keyword(s):

Heterogeneous Integration ◽

3D Packaging ◽

Technology Trends

Get full-text (via PubEx)

Silicon-Interconnect Fabric for Fine-pitch (≤10 μm) Heterogeneous Integration

IEEE Transactions on Components Packaging and Manufacturing Technology ◽

10.1109/tcpmt.2021.3075219 ◽

2021 ◽

pp. 1-1

Author(s):

Siva Chandra Jangam ◽

Subramanian S. Iyer

Keyword(s):

Heterogeneous Integration ◽

Fine Pitch

Get full-text (via PubEx)

Thick Sol-Gel PZT Film integrated in SQI-Based, Micromachined Ultrasonic Transducers

2006 5th IEEE Conference on Sensors ◽

10.1109/icsens.2007.355703 ◽

2006 ◽

Cited By ~ 1

Author(s):

Brahim Belgacem ◽

Florian Calame ◽

Paul Muralt

Keyword(s):

Sol Gel ◽

Ultrasonic Transducers ◽

Pzt Film

Get full-text (via PubEx)

More-Than-Moore: 3D heterogeneous integration into CMOS technologies

2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ◽

10.1109/nems.2017.8016961 ◽

2017 ◽

Author(s):

Albert Wang ◽

Qi Chen ◽

Cheng Li ◽

Fei Lu ◽

Chenkun Wang ◽

...

Keyword(s):

Heterogeneous Integration

Get full-text (via PubEx)

Challenges in Placement Requirements for Heterogeneous Integration

2020 IEEE 22nd Electronics Packaging Technology Conference (EPTC) ◽

10.1109/eptc50525.2020.9315100 ◽

2020 ◽

Author(s):

Chan Pin Chong

Keyword(s):

Heterogeneous Integration

Get full-text (via PubEx)

Monolithic Heterogeneous Integration of BEOL Power Gating Transistors of Carbon Nanotube Networks with FEOL Si Ring Oscillator Circuits

2019 IEEE International Electron Devices Meeting (IEDM) ◽

10.1109/iedm19573.2019.8993593 ◽

2019 ◽

Author(s):

Chao-Ching Cheng ◽

Lain-Jong Li ◽

H.-S. Philip Wong ◽

Chun-Chieh Lu ◽

Tsu-Ang Chao ◽

...

Keyword(s):

Carbon Nanotube ◽

Ring Oscillator ◽

Heterogeneous Integration ◽

Power Gating ◽

Carbon Nanotube Networks ◽

Oscillator Circuits

Get full-text (via PubEx)