scholarly journals Microstructure and dielectric response of (1 1 1)-oriented tetragonal BaTiO3 thick films prepared by laser chemical vapor deposition

2013 ◽  
Vol 1 (2) ◽  
pp. 197-201 ◽  
Author(s):  
Dongyun Guo ◽  
Akihiko Ito ◽  
Rong Tu ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Dielectric Response ◽  
Thick Films ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition

Ba2TiO4 and Ba4Ti13O30 Thick Films Prepared by Laser Chemical Vapor Deposition and their Microstructure

2012 ◽  
Vol 508 ◽  
pp. 199-202
Author(s):  
Dong Yun Guo ◽  
Akihiko Ito ◽  
Rong Tu ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Single Phase ◽  
Thick Films ◽  
Chemical Vapor ◽  
Molar Ratio ◽  
Laser Chemical Vapor Deposition ◽  
Columnar Growth ◽  
Deposition Rates

Ba2TiO4 and Ba4Ti13O30 Thick Films Were Prepared by Laser Chemical Vapor Deposition Using Ba- and Ti-Dipivaloylmethanate Precursors. Single-Phase Ba2TiO4 Thick Films Were Obtained at 845–946 K and Ba/Ti Source Molar Ratio 2.4. Single-Phase Ba4Ti13O30 Films Were Obtained at 944–1011 K and Ba/Ti Source Molar Ratio 0.38. Ba2TiO4 Thick Films Consisted of Truncated Grains, while Ba4ti13o30 Thick Films Had Shellfish-Like Grains. Ba2TiO4 and Ba4Ti13O30 Thick Films Showed a Columnar Growth and their Deposition Rates Were 72 and 132 μm h−1, Respectively.

scholarly journals Preparation of TiO2-rich Ba-Ti-O thick films by laser chemical vapor deposition method

2013 ◽  
Vol 2 (2) ◽  
pp. 167-172 ◽  
Author(s):  
Dongyun Guo ◽  
Akihiko Ito ◽  
Takashi Goto ◽  
Rong Tu ◽  
Chuanbin Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Thick Films ◽  
Chemical Vapor ◽  
Chemical Vapor Deposition Method ◽  
Deposition Method ◽  
Laser Chemical Vapor Deposition

Fine‐grained 3C‐SiC thick films prepared via hybrid laser chemical vapor deposition

2019 ◽  
Vol 102 (9) ◽  
pp. 5668-5678 ◽  
Author(s):  
Youfeng Lai ◽  
Hong Cheng ◽  
Zhenglin Jia ◽  
Qizhong Li ◽  
Meijun Yang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Thick Films ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Fine Grained
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