Experimental and numerical investigation of laboratory crystal growth furnace for the development of model-based control of CZ process
2004 ◽
Vol 266
(1-3)
◽
pp. 182-189
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1991 ◽
Vol 113
(1-2)
◽
pp. 265-278
◽
Keyword(s):
2011 ◽
Vol 131
(2)
◽
pp. 159-165
◽
2020 ◽
Vol 140
(4)
◽
pp. 272-280
Keyword(s):
Keyword(s):
1999 ◽